Quantification of Friction Force on Dual-Axis Micro-Mechanical Probe for Friction Force Microscopy
Conventional friction force microscopes (FFMs), where micro cantilever probes are used, have a disadvantage that the accurate quantification of friction force has not been established yet. This comes from the difficulty of measurement of the probe torsion angle. On the other hand, a recently develop...
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Japanese Society of Tribologists
2010
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oai:doaj.org-article:0023e79799a2406a95a8de7a1a2f4d1d2021-11-05T09:27:04ZQuantification of Friction Force on Dual-Axis Micro-Mechanical Probe for Friction Force Microscopy1881-219810.2474/trol.5.144https://doaj.org/article/0023e79799a2406a95a8de7a1a2f4d1d2010-07-01T00:00:00Zhttps://www.jstage.jst.go.jp/article/trol/5/3/5_3_144/_pdf/-char/enhttps://doaj.org/toc/1881-2198Conventional friction force microscopes (FFMs), where micro cantilever probes are used, have a disadvantage that the accurate quantification of friction force has not been established yet. This comes from the difficulty of measurement of the probe torsion angle. On the other hand, a recently developed dual-axis micro-mechanical probe does not require the torsion angle but the lateral displacement for the quantification of friction force. This probe measures the friction force with a double cantilever beam and the normal force with a torsion beam. Since the measurement of the lateral displacement is easier than that of the torsion angle, the dual-axis micro-mechanical probe is expected to provide more accurate and reproducible quantification. In this paper, we investigated two calibration methods for dual-axis micro-mechanical probes; probe adhesion and step structure methods. The probe adhesion method showed rather poor reproducibility for the lateral displacement detection. In contrast, the step structure method showed good reproducibility and good accuracy with the minimum detection limit of the order of 0.1 nm, which corresponds to the friction force of sub-nN for the probes with a spring constant of the order of 1 N/m. The dual-axis micro-mechanical probe can be used to quantify the nanotribological properties accurately.Hiroaki AmakawaKenji FukuzawaMitsuhiro ShikidaHedong ZhangShintaro ItohJapanese Society of Tribologistsarticleatomic force microscopefriction force microscopetribology, cantilever probePhysicsQC1-999Engineering (General). Civil engineering (General)TA1-2040Mechanical engineering and machineryTJ1-1570ChemistryQD1-999ENTribology Online, Vol 5, Iss 3, Pp 144-149 (2010) |
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atomic force microscope friction force microscope tribology, cantilever probe Physics QC1-999 Engineering (General). Civil engineering (General) TA1-2040 Mechanical engineering and machinery TJ1-1570 Chemistry QD1-999 |
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atomic force microscope friction force microscope tribology, cantilever probe Physics QC1-999 Engineering (General). Civil engineering (General) TA1-2040 Mechanical engineering and machinery TJ1-1570 Chemistry QD1-999 Hiroaki Amakawa Kenji Fukuzawa Mitsuhiro Shikida Hedong Zhang Shintaro Itoh Quantification of Friction Force on Dual-Axis Micro-Mechanical Probe for Friction Force Microscopy |
description |
Conventional friction force microscopes (FFMs), where micro cantilever probes are used, have a disadvantage that the accurate quantification of friction force has not been established yet. This comes from the difficulty of measurement of the probe torsion angle. On the other hand, a recently developed dual-axis micro-mechanical probe does not require the torsion angle but the lateral displacement for the quantification of friction force. This probe measures the friction force with a double cantilever beam and the normal force with a torsion beam. Since the measurement of the lateral displacement is easier than that of the torsion angle, the dual-axis micro-mechanical probe is expected to provide more accurate and reproducible quantification. In this paper, we investigated two calibration methods for dual-axis micro-mechanical probes; probe adhesion and step structure methods. The probe adhesion method showed rather poor reproducibility for the lateral displacement detection. In contrast, the step structure method showed good reproducibility and good accuracy with the minimum detection limit of the order of 0.1 nm, which corresponds to the friction force of sub-nN for the probes with a spring constant of the order of 1 N/m. The dual-axis micro-mechanical probe can be used to quantify the nanotribological properties accurately. |
format |
article |
author |
Hiroaki Amakawa Kenji Fukuzawa Mitsuhiro Shikida Hedong Zhang Shintaro Itoh |
author_facet |
Hiroaki Amakawa Kenji Fukuzawa Mitsuhiro Shikida Hedong Zhang Shintaro Itoh |
author_sort |
Hiroaki Amakawa |
title |
Quantification of Friction Force on Dual-Axis Micro-Mechanical Probe for Friction Force Microscopy |
title_short |
Quantification of Friction Force on Dual-Axis Micro-Mechanical Probe for Friction Force Microscopy |
title_full |
Quantification of Friction Force on Dual-Axis Micro-Mechanical Probe for Friction Force Microscopy |
title_fullStr |
Quantification of Friction Force on Dual-Axis Micro-Mechanical Probe for Friction Force Microscopy |
title_full_unstemmed |
Quantification of Friction Force on Dual-Axis Micro-Mechanical Probe for Friction Force Microscopy |
title_sort |
quantification of friction force on dual-axis micro-mechanical probe for friction force microscopy |
publisher |
Japanese Society of Tribologists |
publishDate |
2010 |
url |
https://doaj.org/article/0023e79799a2406a95a8de7a1a2f4d1d |
work_keys_str_mv |
AT hiroakiamakawa quantificationoffrictionforceondualaxismicromechanicalprobeforfrictionforcemicroscopy AT kenjifukuzawa quantificationoffrictionforceondualaxismicromechanicalprobeforfrictionforcemicroscopy AT mitsuhiroshikida quantificationoffrictionforceondualaxismicromechanicalprobeforfrictionforcemicroscopy AT hedongzhang quantificationoffrictionforceondualaxismicromechanicalprobeforfrictionforcemicroscopy AT shintaroitoh quantificationoffrictionforceondualaxismicromechanicalprobeforfrictionforcemicroscopy |
_version_ |
1718444326145490944 |