Theoretical and Experimental Research on Terahertz Metamaterial Sensor With Flexible Substrate

A terahertz metamaterial refractive index/thickness sensor with flexible substrate, exhibiting low-frequency Fano resonance and high-frequency electromagnetically induced transparent (EIT) resonance, is proposed. The physical formation mechanisms of Fano and EIT resonances are investigate...

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Autores principales:	Haizi Yao, Hongying Mei, Weiwei Zhang, Shuncong Zhong, Xiangfeng Wang
Formato:	article
Lenguaje:	EN
Publicado:	IEEE 2022
Materias:	Terahertz metamaterials biosensors thickness measurement refractive index sensing Applied optics. Photonics TA1501-1820 Optics. Light QC350-467
Acceso en línea:	https://doaj.org/article/03c5d83497ae422caf37c06299abf084
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spelling	oai:doaj.org-article:03c5d83497ae422caf37c06299abf0842021-11-18T00:00:03ZTheoretical and Experimental Research on Terahertz Metamaterial Sensor With Flexible Substrate1943-065510.1109/JPHOT.2021.3124414https://doaj.org/article/03c5d83497ae422caf37c06299abf0842022-01-01T00:00:00Zhttps://ieeexplore.ieee.org/document/9599571/https://doaj.org/toc/1943-0655A terahertz metamaterial refractive index/thickness sensor with flexible substrate, exhibiting low-frequency Fano resonance and high-frequency electromagnetically induced transparent (EIT) resonance, is proposed. The physical formation mechanisms of Fano and EIT resonances are investigated by calculating the electromagnetic field. Simulated results demonstrate that the refractive index sensing sensitivity based these two resonances are up to 60 and 100 GHz/RIU, and the thickness sensing sensitivity are up to 1 and 1.7 GHz/μm, respectively. Furthermore, the proposed sensor was fabricated using femtosecond laser etching technology, and its sensing performance was verified by the experimental results that it can distinguish different liquids and detect the polyimide film with different thicknesses less than 180 μm. The remarkable performances make the proposed metamaterial sensor has feasible capability for biological and chemical sensing in terahertz range.Haizi YaoHongying MeiWeiwei ZhangShuncong ZhongXiangfeng WangIEEEarticleTerahertz metamaterialsbiosensorsthickness measurementrefractive index sensingApplied optics. PhotonicsTA1501-1820Optics. LightQC350-467ENIEEE Photonics Journal, Vol 14, Iss 1, Pp 1-9 (2022)
institution	DOAJ
collection	DOAJ
language	EN
topic	Terahertz metamaterials biosensors thickness measurement refractive index sensing Applied optics. Photonics TA1501-1820 Optics. Light QC350-467
spellingShingle	Terahertz metamaterials biosensors thickness measurement refractive index sensing Applied optics. Photonics TA1501-1820 Optics. Light QC350-467 Haizi Yao Hongying Mei Weiwei Zhang Shuncong Zhong Xiangfeng Wang Theoretical and Experimental Research on Terahertz Metamaterial Sensor With Flexible Substrate
description	A terahertz metamaterial refractive index/thickness sensor with flexible substrate, exhibiting low-frequency Fano resonance and high-frequency electromagnetically induced transparent (EIT) resonance, is proposed. The physical formation mechanisms of Fano and EIT resonances are investigated by calculating the electromagnetic field. Simulated results demonstrate that the refractive index sensing sensitivity based these two resonances are up to 60 and 100 GHz/RIU, and the thickness sensing sensitivity are up to 1 and 1.7 GHz/μm, respectively. Furthermore, the proposed sensor was fabricated using femtosecond laser etching technology, and its sensing performance was verified by the experimental results that it can distinguish different liquids and detect the polyimide film with different thicknesses less than 180 μm. The remarkable performances make the proposed metamaterial sensor has feasible capability for biological and chemical sensing in terahertz range.
format	article
author	Haizi Yao Hongying Mei Weiwei Zhang Shuncong Zhong Xiangfeng Wang
author_facet	Haizi Yao Hongying Mei Weiwei Zhang Shuncong Zhong Xiangfeng Wang
author_sort	Haizi Yao
title	Theoretical and Experimental Research on Terahertz Metamaterial Sensor With Flexible Substrate
title_short	Theoretical and Experimental Research on Terahertz Metamaterial Sensor With Flexible Substrate
title_full	Theoretical and Experimental Research on Terahertz Metamaterial Sensor With Flexible Substrate
title_fullStr	Theoretical and Experimental Research on Terahertz Metamaterial Sensor With Flexible Substrate
title_full_unstemmed	Theoretical and Experimental Research on Terahertz Metamaterial Sensor With Flexible Substrate
title_sort	theoretical and experimental research on terahertz metamaterial sensor with flexible substrate
publisher	IEEE
publishDate	2022
url	https://doaj.org/article/03c5d83497ae422caf37c06299abf084
work_keys_str_mv	AT haiziyao theoreticalandexperimentalresearchonterahertzmetamaterialsensorwithflexiblesubstrate AT hongyingmei theoreticalandexperimentalresearchonterahertzmetamaterialsensorwithflexiblesubstrate AT weiweizhang theoreticalandexperimentalresearchonterahertzmetamaterialsensorwithflexiblesubstrate AT shuncongzhong theoreticalandexperimentalresearchonterahertzmetamaterialsensorwithflexiblesubstrate AT xiangfengwang theoreticalandexperimentalresearchonterahertzmetamaterialsensorwithflexiblesubstrate
_version_	1718425266079924224

Theoretical and Experimental Research on Terahertz Metamaterial Sensor With Flexible Substrate

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