Obliquely Bideposited TiN Thin Film with Morphology-Dependent Optical Properties

TiN thin films were obliquely bideposited with different subdeposit thicknesses. The morphology of the bideposited film was varied from a nano-zigzag array to a vertically grown columnar structure by reducing the subdeposit thickness. The principal index of refraction and extinction coefficient were...

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Autores principales:	Yi-Jun Jen, Wei-Chieh Ma, Ting-Yen Lin
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	titanium nitride glancing angle deposition nanostructure refractive index Engineering (General). Civil engineering (General) TA1-2040
Acceso en línea:	https://doaj.org/article/057ccc55c70942dd9d524b901201e6ec
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spelling	oai:doaj.org-article:057ccc55c70942dd9d524b901201e6ec2021-11-25T17:17:00ZObliquely Bideposited TiN Thin Film with Morphology-Dependent Optical Properties10.3390/coatings111114182079-6412https://doaj.org/article/057ccc55c70942dd9d524b901201e6ec2021-11-01T00:00:00Zhttps://www.mdpi.com/2079-6412/11/11/1418https://doaj.org/toc/2079-6412TiN thin films were obliquely bideposited with different subdeposit thicknesses. The morphology of the bideposited film was varied from a nano-zigzag array to a vertically grown columnar structure by reducing the subdeposit thickness. The principal index of refraction and extinction coefficient were obtained to explain the measured reflectance and transmittance spectra. The loss of the bideposited thin film decreased as the thickness of the subdeposit decreased. The principal indices for normal incidence were near or under unity, indicating the low reflection by the bideposited thin films. A TiN film with a subdeposit thickness of 3 nm demonstrated an average index of refraction of 0.83 and extinction coefficient of below 0.2 for visible wavelengths. The retrieved principal refractive indexes explained the anisotropic transmission and reflection. For most normal incident cases, the analysis offers the tunable anisotropic property of a TiN nanostructured film for multilayer design in the future.Yi-Jun JenWei-Chieh MaTing-Yen LinMDPI AGarticletitanium nitrideglancing angle depositionnanostructurerefractive indexEngineering (General). Civil engineering (General)TA1-2040ENCoatings, Vol 11, Iss 1418, p 1418 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	titanium nitride glancing angle deposition nanostructure refractive index Engineering (General). Civil engineering (General) TA1-2040
spellingShingle	titanium nitride glancing angle deposition nanostructure refractive index Engineering (General). Civil engineering (General) TA1-2040 Yi-Jun Jen Wei-Chieh Ma Ting-Yen Lin Obliquely Bideposited TiN Thin Film with Morphology-Dependent Optical Properties
description	TiN thin films were obliquely bideposited with different subdeposit thicknesses. The morphology of the bideposited film was varied from a nano-zigzag array to a vertically grown columnar structure by reducing the subdeposit thickness. The principal index of refraction and extinction coefficient were obtained to explain the measured reflectance and transmittance spectra. The loss of the bideposited thin film decreased as the thickness of the subdeposit decreased. The principal indices for normal incidence were near or under unity, indicating the low reflection by the bideposited thin films. A TiN film with a subdeposit thickness of 3 nm demonstrated an average index of refraction of 0.83 and extinction coefficient of below 0.2 for visible wavelengths. The retrieved principal refractive indexes explained the anisotropic transmission and reflection. For most normal incident cases, the analysis offers the tunable anisotropic property of a TiN nanostructured film for multilayer design in the future.
format	article
author	Yi-Jun Jen Wei-Chieh Ma Ting-Yen Lin
author_facet	Yi-Jun Jen Wei-Chieh Ma Ting-Yen Lin
author_sort	Yi-Jun Jen
title	Obliquely Bideposited TiN Thin Film with Morphology-Dependent Optical Properties
title_short	Obliquely Bideposited TiN Thin Film with Morphology-Dependent Optical Properties
title_full	Obliquely Bideposited TiN Thin Film with Morphology-Dependent Optical Properties
title_fullStr	Obliquely Bideposited TiN Thin Film with Morphology-Dependent Optical Properties
title_full_unstemmed	Obliquely Bideposited TiN Thin Film with Morphology-Dependent Optical Properties
title_sort	obliquely bideposited tin thin film with morphology-dependent optical properties
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/057ccc55c70942dd9d524b901201e6ec
work_keys_str_mv	AT yijunjen obliquelybidepositedtinthinfilmwithmorphologydependentopticalproperties AT weichiehma obliquelybidepositedtinthinfilmwithmorphologydependentopticalproperties AT tingyenlin obliquelybidepositedtinthinfilmwithmorphologydependentopticalproperties
_version_	1718412509222797312

Obliquely Bideposited TiN Thin Film with Morphology-Dependent Optical Properties

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