Obliquely Bideposited TiN Thin Film with Morphology-Dependent Optical Properties
TiN thin films were obliquely bideposited with different subdeposit thicknesses. The morphology of the bideposited film was varied from a nano-zigzag array to a vertically grown columnar structure by reducing the subdeposit thickness. The principal index of refraction and extinction coefficient were...
Guardado en:
Autores principales: | Yi-Jun Jen, Wei-Chieh Ma, Ting-Yen Lin |
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Formato: | article |
Lenguaje: | EN |
Publicado: |
MDPI AG
2021
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Materias: | |
Acceso en línea: | https://doaj.org/article/057ccc55c70942dd9d524b901201e6ec |
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