Nano silica diaphragm in-fiber cavity for gas pressure measurement

Abstract We demonstrate an ultrahigh-sensitivity gas pressure sensor based on the Fabry-Perot interferometer employing a fiber-tip diaphragm-sealed cavity. The cavity is comprised of a silica capillary and ultrathin silica diaphragm with a thickness of 170 nm, with represents the thinnest silica dia...

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Autores principales: Shen Liu, Yiping Wang, Changrui Liao, Ying Wang, Jun He, Cailing Fu, Kaiming Yang, Zhiyong Bai, Feng Zhang
Formato: article
Lenguaje:EN
Publicado: Nature Portfolio 2017
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Acceso en línea:https://doaj.org/article/05c7285d4f634bd6b2b369ea1221af36
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Sumario:Abstract We demonstrate an ultrahigh-sensitivity gas pressure sensor based on the Fabry-Perot interferometer employing a fiber-tip diaphragm-sealed cavity. The cavity is comprised of a silica capillary and ultrathin silica diaphragm with a thickness of 170 nm, with represents the thinnest silica diaphragm fabricated thus far by an electrical arc discharge technique. The resulting Fabry-Perot interferometer-based gas pressure sensor demonstrates a gas pressure sensitivity of about 12.22 nm/kPa, which is more than two orders of magnitude greater than that of a similarly configured fiber-tip air bubble sensor. Moreover, our gas pressure sensor has a low temperature cross-sensitivity of about 106 Pa/°C, and the sensor functions well up to a temperature of about 1000 °C. As such, the sensor can potentially be employed in high-temperature environments.