Nano silica diaphragm in-fiber cavity for gas pressure measurement

Abstract We demonstrate an ultrahigh-sensitivity gas pressure sensor based on the Fabry-Perot interferometer employing a fiber-tip diaphragm-sealed cavity. The cavity is comprised of a silica capillary and ultrathin silica diaphragm with a thickness of 170 nm, with represents the thinnest silica dia...

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Autores principales:	Shen Liu, Yiping Wang, Changrui Liao, Ying Wang, Jun He, Cailing Fu, Kaiming Yang, Zhiyong Bai, Feng Zhang
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2017
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/05c7285d4f634bd6b2b369ea1221af36
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spelling	oai:doaj.org-article:05c7285d4f634bd6b2b369ea1221af362021-12-02T11:52:21ZNano silica diaphragm in-fiber cavity for gas pressure measurement10.1038/s41598-017-00931-02045-2322https://doaj.org/article/05c7285d4f634bd6b2b369ea1221af362017-04-01T00:00:00Zhttps://doi.org/10.1038/s41598-017-00931-0https://doaj.org/toc/2045-2322Abstract We demonstrate an ultrahigh-sensitivity gas pressure sensor based on the Fabry-Perot interferometer employing a fiber-tip diaphragm-sealed cavity. The cavity is comprised of a silica capillary and ultrathin silica diaphragm with a thickness of 170 nm, with represents the thinnest silica diaphragm fabricated thus far by an electrical arc discharge technique. The resulting Fabry-Perot interferometer-based gas pressure sensor demonstrates a gas pressure sensitivity of about 12.22 nm/kPa, which is more than two orders of magnitude greater than that of a similarly configured fiber-tip air bubble sensor. Moreover, our gas pressure sensor has a low temperature cross-sensitivity of about 106 Pa/°C, and the sensor functions well up to a temperature of about 1000 °C. As such, the sensor can potentially be employed in high-temperature environments.Shen LiuYiping WangChangrui LiaoYing WangJun HeCailing FuKaiming YangZhiyong BaiFeng ZhangNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 7, Iss 1, Pp 1-9 (2017)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Shen Liu Yiping Wang Changrui Liao Ying Wang Jun He Cailing Fu Kaiming Yang Zhiyong Bai Feng Zhang Nano silica diaphragm in-fiber cavity for gas pressure measurement
description	Abstract We demonstrate an ultrahigh-sensitivity gas pressure sensor based on the Fabry-Perot interferometer employing a fiber-tip diaphragm-sealed cavity. The cavity is comprised of a silica capillary and ultrathin silica diaphragm with a thickness of 170 nm, with represents the thinnest silica diaphragm fabricated thus far by an electrical arc discharge technique. The resulting Fabry-Perot interferometer-based gas pressure sensor demonstrates a gas pressure sensitivity of about 12.22 nm/kPa, which is more than two orders of magnitude greater than that of a similarly configured fiber-tip air bubble sensor. Moreover, our gas pressure sensor has a low temperature cross-sensitivity of about 106 Pa/°C, and the sensor functions well up to a temperature of about 1000 °C. As such, the sensor can potentially be employed in high-temperature environments.
format	article
author	Shen Liu Yiping Wang Changrui Liao Ying Wang Jun He Cailing Fu Kaiming Yang Zhiyong Bai Feng Zhang
author_facet	Shen Liu Yiping Wang Changrui Liao Ying Wang Jun He Cailing Fu Kaiming Yang Zhiyong Bai Feng Zhang
author_sort	Shen Liu
title	Nano silica diaphragm in-fiber cavity for gas pressure measurement
title_short	Nano silica diaphragm in-fiber cavity for gas pressure measurement
title_full	Nano silica diaphragm in-fiber cavity for gas pressure measurement
title_fullStr	Nano silica diaphragm in-fiber cavity for gas pressure measurement
title_full_unstemmed	Nano silica diaphragm in-fiber cavity for gas pressure measurement
title_sort	nano silica diaphragm in-fiber cavity for gas pressure measurement
publisher	Nature Portfolio
publishDate	2017
url	https://doaj.org/article/05c7285d4f634bd6b2b369ea1221af36
work_keys_str_mv	AT shenliu nanosilicadiaphragminfibercavityforgaspressuremeasurement AT yipingwang nanosilicadiaphragminfibercavityforgaspressuremeasurement AT changruiliao nanosilicadiaphragminfibercavityforgaspressuremeasurement AT yingwang nanosilicadiaphragminfibercavityforgaspressuremeasurement AT junhe nanosilicadiaphragminfibercavityforgaspressuremeasurement AT cailingfu nanosilicadiaphragminfibercavityforgaspressuremeasurement AT kaimingyang nanosilicadiaphragminfibercavityforgaspressuremeasurement AT zhiyongbai nanosilicadiaphragminfibercavityforgaspressuremeasurement AT fengzhang nanosilicadiaphragminfibercavityforgaspressuremeasurement
_version_	1718395026054053888

Nano silica diaphragm in-fiber cavity for gas pressure measurement

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