Research on the Force-Sensitive Characteristic of InAs QD Embedded in HEMT
A force-sensitive structure of an InAs Quantum Dot (QD) embedded in a high electron mobility transistor (HEMT) is presented in this paper. The size of an InAs QD is about 30 nm prepared by the S-K growth mode, and the force-sensitive structure is fabricated by molecular beam epitaxy (MBE). The force...
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Auteurs principaux: | , , , , |
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Format: | article |
Langue: | EN |
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MDPI AG
2021
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Accès en ligne: | https://doaj.org/article/077282d0bd3e4599aabd48d09f76c611 |
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