Challenges in nanofabrication for efficient optical metasurfaces

Abstract Optical metasurfaces have raised immense expectations as cheaper and lighter alternatives to bulk optical components. In recent years, novel components combining multiple optical functions have been proposed pushing further the level of requirement on the manufacturing precision of these ob...

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Autores principales:	Adelin Patoux, Gonzague Agez, Christian Girard, Vincent Paillard, Peter R. Wiecha, Aurélie Lecestre, Franck Carcenac, Guilhem Larrieu, Arnaud Arbouet
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2021
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/082d05f76129401387167c9807f630d3
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id	oai:doaj.org-article:082d05f76129401387167c9807f630d3
record_format	dspace
spelling	oai:doaj.org-article:082d05f76129401387167c9807f630d32021-12-02T13:30:51ZChallenges in nanofabrication for efficient optical metasurfaces10.1038/s41598-021-84666-z2045-2322https://doaj.org/article/082d05f76129401387167c9807f630d32021-03-01T00:00:00Zhttps://doi.org/10.1038/s41598-021-84666-zhttps://doaj.org/toc/2045-2322Abstract Optical metasurfaces have raised immense expectations as cheaper and lighter alternatives to bulk optical components. In recent years, novel components combining multiple optical functions have been proposed pushing further the level of requirement on the manufacturing precision of these objects. In this work, we study in details the influence of the most common fabrication errors on the optical response of a metasurface and quantitatively assess the tolerance to fabrication errors based on extensive numerical simulations. We illustrate these results with the design, fabrication and characterization of a silicon nanoresonator-based metasurface that operates as a beam deflector in the near-infrared range.Adelin PatouxGonzague AgezChristian GirardVincent PaillardPeter R. WiechaAurélie LecestreFranck CarcenacGuilhem LarrieuArnaud ArbouetNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 11, Iss 1, Pp 1-12 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Adelin Patoux Gonzague Agez Christian Girard Vincent Paillard Peter R. Wiecha Aurélie Lecestre Franck Carcenac Guilhem Larrieu Arnaud Arbouet Challenges in nanofabrication for efficient optical metasurfaces
description	Abstract Optical metasurfaces have raised immense expectations as cheaper and lighter alternatives to bulk optical components. In recent years, novel components combining multiple optical functions have been proposed pushing further the level of requirement on the manufacturing precision of these objects. In this work, we study in details the influence of the most common fabrication errors on the optical response of a metasurface and quantitatively assess the tolerance to fabrication errors based on extensive numerical simulations. We illustrate these results with the design, fabrication and characterization of a silicon nanoresonator-based metasurface that operates as a beam deflector in the near-infrared range.
format	article
author	Adelin Patoux Gonzague Agez Christian Girard Vincent Paillard Peter R. Wiecha Aurélie Lecestre Franck Carcenac Guilhem Larrieu Arnaud Arbouet
author_facet	Adelin Patoux Gonzague Agez Christian Girard Vincent Paillard Peter R. Wiecha Aurélie Lecestre Franck Carcenac Guilhem Larrieu Arnaud Arbouet
author_sort	Adelin Patoux
title	Challenges in nanofabrication for efficient optical metasurfaces
title_short	Challenges in nanofabrication for efficient optical metasurfaces
title_full	Challenges in nanofabrication for efficient optical metasurfaces
title_fullStr	Challenges in nanofabrication for efficient optical metasurfaces
title_full_unstemmed	Challenges in nanofabrication for efficient optical metasurfaces
title_sort	challenges in nanofabrication for efficient optical metasurfaces
publisher	Nature Portfolio
publishDate	2021
url	https://doaj.org/article/082d05f76129401387167c9807f630d3
work_keys_str_mv	AT adelinpatoux challengesinnanofabricationforefficientopticalmetasurfaces AT gonzagueagez challengesinnanofabricationforefficientopticalmetasurfaces AT christiangirard challengesinnanofabricationforefficientopticalmetasurfaces AT vincentpaillard challengesinnanofabricationforefficientopticalmetasurfaces AT peterrwiecha challengesinnanofabricationforefficientopticalmetasurfaces AT aurelielecestre challengesinnanofabricationforefficientopticalmetasurfaces AT franckcarcenac challengesinnanofabricationforefficientopticalmetasurfaces AT guilhemlarrieu challengesinnanofabricationforefficientopticalmetasurfaces AT arnaudarbouet challengesinnanofabricationforefficientopticalmetasurfaces
_version_	1718392895497568256

Challenges in nanofabrication for efficient optical metasurfaces

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