Design, Simulation, and Analysis of Micro/Nanoelectromechanical System Rotational Devices

This work is focused on design and simulation of microelectromechanical system (MEMS)/nanoelectromechanical system (NEMS) rotational devices such as micro/nanothermal rotary actuator and micro/nanogear. MEMS/NEMS technologies have allowed the development of advanced miniaturized rotational devices....

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Autores principales:	A. R. Kalaiarasi, T. Deepa, S. Angalaeswari, D. Subbulekshmi, Raja Kathiravan
Formato:	article
Lenguaje:	EN
Publicado:	Hindawi Limited 2021
Materias:	Technology (General) T1-995
Acceso en línea:	https://doaj.org/article/0d4af369b146481a859c8ea80134fb64
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spelling	oai:doaj.org-article:0d4af369b146481a859c8ea80134fb642021-11-22T01:10:16ZDesign, Simulation, and Analysis of Micro/Nanoelectromechanical System Rotational Devices1687-412910.1155/2021/6244874https://doaj.org/article/0d4af369b146481a859c8ea80134fb642021-01-01T00:00:00Zhttp://dx.doi.org/10.1155/2021/6244874https://doaj.org/toc/1687-4129This work is focused on design and simulation of microelectromechanical system (MEMS)/nanoelectromechanical system (NEMS) rotational devices such as micro/nanothermal rotary actuator and micro/nanogear. MEMS/NEMS technologies have allowed the development of advanced miniaturized rotational devices. MEMS/NEMS-based thermal actuator is a scaled version of movable device which will produce amplified motion when it is subjected to thermal forces. One of the applications of such thermal micro/nanoactuator is integrating it into micro/nanomotor that makes a thermal actuated micro/nanomotor. In this work, design and simulation of micro/nanothermal rotary actuator are done using MEMS/NEMS technology. Stress, current density, and temperature analysis are done for microthermal rotary actuator. The performance of the device is observed by varying the dimensions and materials such as silicon and polysilicon. Stress analysis is used to calculate the yield strength of the material. Current density is used to calculate the safer limit of the material. Temperature analysis is used to calculate the melting point of the material. Also, in this work, design and simulation of microgear have been done. Micro/nanogears are devices that can be used to improve motion performance. The essential is that it transmits rotational motion to a different axis.A. R. KalaiarasiT. DeepaS. AngalaeswariD. SubbulekshmiRaja KathiravanHindawi LimitedarticleTechnology (General)T1-995ENJournal of Nanomaterials, Vol 2021 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Technology (General) T1-995
spellingShingle	Technology (General) T1-995 A. R. Kalaiarasi T. Deepa S. Angalaeswari D. Subbulekshmi Raja Kathiravan Design, Simulation, and Analysis of Micro/Nanoelectromechanical System Rotational Devices
description	This work is focused on design and simulation of microelectromechanical system (MEMS)/nanoelectromechanical system (NEMS) rotational devices such as micro/nanothermal rotary actuator and micro/nanogear. MEMS/NEMS technologies have allowed the development of advanced miniaturized rotational devices. MEMS/NEMS-based thermal actuator is a scaled version of movable device which will produce amplified motion when it is subjected to thermal forces. One of the applications of such thermal micro/nanoactuator is integrating it into micro/nanomotor that makes a thermal actuated micro/nanomotor. In this work, design and simulation of micro/nanothermal rotary actuator are done using MEMS/NEMS technology. Stress, current density, and temperature analysis are done for microthermal rotary actuator. The performance of the device is observed by varying the dimensions and materials such as silicon and polysilicon. Stress analysis is used to calculate the yield strength of the material. Current density is used to calculate the safer limit of the material. Temperature analysis is used to calculate the melting point of the material. Also, in this work, design and simulation of microgear have been done. Micro/nanogears are devices that can be used to improve motion performance. The essential is that it transmits rotational motion to a different axis.
format	article
author	A. R. Kalaiarasi T. Deepa S. Angalaeswari D. Subbulekshmi Raja Kathiravan
author_facet	A. R. Kalaiarasi T. Deepa S. Angalaeswari D. Subbulekshmi Raja Kathiravan
author_sort	A. R. Kalaiarasi
title	Design, Simulation, and Analysis of Micro/Nanoelectromechanical System Rotational Devices
title_short	Design, Simulation, and Analysis of Micro/Nanoelectromechanical System Rotational Devices
title_full	Design, Simulation, and Analysis of Micro/Nanoelectromechanical System Rotational Devices
title_fullStr	Design, Simulation, and Analysis of Micro/Nanoelectromechanical System Rotational Devices
title_full_unstemmed	Design, Simulation, and Analysis of Micro/Nanoelectromechanical System Rotational Devices
title_sort	design, simulation, and analysis of micro/nanoelectromechanical system rotational devices
publisher	Hindawi Limited
publishDate	2021
url	https://doaj.org/article/0d4af369b146481a859c8ea80134fb64
work_keys_str_mv	AT arkalaiarasi designsimulationandanalysisofmicronanoelectromechanicalsystemrotationaldevices AT tdeepa designsimulationandanalysisofmicronanoelectromechanicalsystemrotationaldevices AT sangalaeswari designsimulationandanalysisofmicronanoelectromechanicalsystemrotationaldevices AT dsubbulekshmi designsimulationandanalysisofmicronanoelectromechanicalsystemrotationaldevices AT rajakathiravan designsimulationandanalysisofmicronanoelectromechanicalsystemrotationaldevices
_version_	1718418322707447808

Design, Simulation, and Analysis of Micro/Nanoelectromechanical System Rotational Devices

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