Design, Simulation, and Analysis of Micro/Nanoelectromechanical System Rotational Devices

This work is focused on design and simulation of microelectromechanical system (MEMS)/nanoelectromechanical system (NEMS) rotational devices such as micro/nanothermal rotary actuator and micro/nanogear. MEMS/NEMS technologies have allowed the development of advanced miniaturized rotational devices....

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Autores principales: A. R. Kalaiarasi, T. Deepa, S. Angalaeswari, D. Subbulekshmi, Raja Kathiravan
Formato: article
Lenguaje:EN
Publicado: Hindawi Limited 2021
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Acceso en línea:https://doaj.org/article/0d4af369b146481a859c8ea80134fb64
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