Experimental characterization of pull-in parameters for an electrostatically actuated cantilever

MEMS-NEMS applications extensively use micro-nano cantilever structures as actuation system, thanks to their intrinsically simple end efficient configuration. Under the action of an electrostatic actuation voltage the cantilever deflects, until it reaches the maximum value of the electrostatic actua...

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Autores principales:	A. Sorrentino, G. Bianchi, D. Castagnetti, E. Radi
Formato:	article
Lenguaje:	EN
Publicado:	Elsevier 2020
Materias:	Pull-In instability MEMS Cantilever actuators Experimental validation Engineering (General). Civil engineering (General) TA1-2040
Acceso en línea:	https://doaj.org/article/0dab9f03ca734ac99b70eb5898efbd2c
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spelling	oai:doaj.org-article:0dab9f03ca734ac99b70eb5898efbd2c2021-12-01T05:05:29ZExperimental characterization of pull-in parameters for an electrostatically actuated cantilever2666-496810.1016/j.apples.2020.100014https://doaj.org/article/0dab9f03ca734ac99b70eb5898efbd2c2020-09-01T00:00:00Zhttp://www.sciencedirect.com/science/article/pii/S2666496820300145https://doaj.org/toc/2666-4968MEMS-NEMS applications extensively use micro-nano cantilever structures as actuation system, thanks to their intrinsically simple end efficient configuration. Under the action of an electrostatic actuation voltage the cantilever deflects, until it reaches the maximum value of the electrostatic actuation voltage, namely the pull-in voltage. This limits its operating point and is a critical issue for the switching of the actuator. The present work aims to experimentally measure the variation of the pull-in voltage and the tip deflection for different geometrical parameters of an electrostatically actuated cantilever. First, by relying on a nonlinear differential model from the literature, we designed and built a macro-scale cantilever switch, which can be simply adapted to different configurations. Second, we experimentally investigated the effect of the free length of the suspended electrode, and of the gap from the ground, on the pull-in response. The experimental results always showed a close agreement with the analytical predictions, with a maximum relative error lower that 10% for the pull-in voltage, and a relative difference lower than 18% for the pull-in deflection.A. SorrentinoG. BianchiD. CastagnettiE. RadiElsevierarticlePull-In instabilityMEMSCantilever actuatorsExperimental validationEngineering (General). Civil engineering (General)TA1-2040ENApplications in Engineering Science, Vol 3, Iss , Pp 100014- (2020)
institution	DOAJ
collection	DOAJ
language	EN
topic	Pull-In instability MEMS Cantilever actuators Experimental validation Engineering (General). Civil engineering (General) TA1-2040
spellingShingle	Pull-In instability MEMS Cantilever actuators Experimental validation Engineering (General). Civil engineering (General) TA1-2040 A. Sorrentino G. Bianchi D. Castagnetti E. Radi Experimental characterization of pull-in parameters for an electrostatically actuated cantilever
description	MEMS-NEMS applications extensively use micro-nano cantilever structures as actuation system, thanks to their intrinsically simple end efficient configuration. Under the action of an electrostatic actuation voltage the cantilever deflects, until it reaches the maximum value of the electrostatic actuation voltage, namely the pull-in voltage. This limits its operating point and is a critical issue for the switching of the actuator. The present work aims to experimentally measure the variation of the pull-in voltage and the tip deflection for different geometrical parameters of an electrostatically actuated cantilever. First, by relying on a nonlinear differential model from the literature, we designed and built a macro-scale cantilever switch, which can be simply adapted to different configurations. Second, we experimentally investigated the effect of the free length of the suspended electrode, and of the gap from the ground, on the pull-in response. The experimental results always showed a close agreement with the analytical predictions, with a maximum relative error lower that 10% for the pull-in voltage, and a relative difference lower than 18% for the pull-in deflection.
format	article
author	A. Sorrentino G. Bianchi D. Castagnetti E. Radi
author_facet	A. Sorrentino G. Bianchi D. Castagnetti E. Radi
author_sort	A. Sorrentino
title	Experimental characterization of pull-in parameters for an electrostatically actuated cantilever
title_short	Experimental characterization of pull-in parameters for an electrostatically actuated cantilever
title_full	Experimental characterization of pull-in parameters for an electrostatically actuated cantilever
title_fullStr	Experimental characterization of pull-in parameters for an electrostatically actuated cantilever
title_full_unstemmed	Experimental characterization of pull-in parameters for an electrostatically actuated cantilever
title_sort	experimental characterization of pull-in parameters for an electrostatically actuated cantilever
publisher	Elsevier
publishDate	2020
url	https://doaj.org/article/0dab9f03ca734ac99b70eb5898efbd2c
work_keys_str_mv	AT asorrentino experimentalcharacterizationofpullinparametersforanelectrostaticallyactuatedcantilever AT gbianchi experimentalcharacterizationofpullinparametersforanelectrostaticallyactuatedcantilever AT dcastagnetti experimentalcharacterizationofpullinparametersforanelectrostaticallyactuatedcantilever AT eradi experimentalcharacterizationofpullinparametersforanelectrostaticallyactuatedcantilever
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Experimental characterization of pull-in parameters for an electrostatically actuated cantilever

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