Experimental characterization of pull-in parameters for an electrostatically actuated cantilever
MEMS-NEMS applications extensively use micro-nano cantilever structures as actuation system, thanks to their intrinsically simple end efficient configuration. Under the action of an electrostatic actuation voltage the cantilever deflects, until it reaches the maximum value of the electrostatic actua...
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| Main Authors: | , , , |
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| Format: | article |
| Language: | EN |
| Published: |
Elsevier
2020
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| Subjects: | |
| Online Access: | https://doaj.org/article/0dab9f03ca734ac99b70eb5898efbd2c |
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