Dual-Frequency Microwave Plasma Source Based on Microwave Coaxial Transmission Line

A dual-frequency plasma source has many advantages in applications. In this paper, a dual-frequency microwave plasma source is presented. This microwave plasma source is based on a coaxial transmission line without the resonator, and it can be operated in a wide band frequency region. Two microwaves...

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Autores principales:	Chi Chen, Wenjie Fu, Chaoyang Zhang, Dun Lu, Meng Han, Yang Yan
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	microwave plasma dual-frequency plasma electron temperature electron density Technology T Engineering (General). Civil engineering (General) TA1-2040 Biology (General) QH301-705.5 Physics QC1-999 Chemistry QD1-999
Acceso en línea:	https://doaj.org/article/0e2e7cfbcb80424d8f59848b26bbda9f
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id	oai:doaj.org-article:0e2e7cfbcb80424d8f59848b26bbda9f
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spelling	oai:doaj.org-article:0e2e7cfbcb80424d8f59848b26bbda9f2021-11-11T14:59:38ZDual-Frequency Microwave Plasma Source Based on Microwave Coaxial Transmission Line10.3390/app112198732076-3417https://doaj.org/article/0e2e7cfbcb80424d8f59848b26bbda9f2021-10-01T00:00:00Zhttps://www.mdpi.com/2076-3417/11/21/9873https://doaj.org/toc/2076-3417A dual-frequency plasma source has many advantages in applications. In this paper, a dual-frequency microwave plasma source is presented. This microwave plasma source is based on a coaxial transmission line without the resonator, and it can be operated in a wide band frequency region. Two microwaves are inputted from two ports into the plasma reactor: one is used firstly to excite the plasma and the other one is used to adjust plasma characteristics. Based on the COMSOL Multiphysics simulation, the experiment is carried out. In the experimental investigation, the plasma electron density and electron temperature can be controlled, respectively, by feeding in different frequencies from the second port, causing the particles at different energy levels to present different frequencies. This exploratory research improves the operation frequency of dual-frequency microwave plasma sources from RF to microwave.Chi ChenWenjie FuChaoyang ZhangDun LuMeng HanYang YanMDPI AGarticlemicrowave plasmadual-frequency plasmaelectron temperatureelectron densityTechnologyTEngineering (General). Civil engineering (General)TA1-2040Biology (General)QH301-705.5PhysicsQC1-999ChemistryQD1-999ENApplied Sciences, Vol 11, Iss 9873, p 9873 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	microwave plasma dual-frequency plasma electron temperature electron density Technology T Engineering (General). Civil engineering (General) TA1-2040 Biology (General) QH301-705.5 Physics QC1-999 Chemistry QD1-999
spellingShingle	microwave plasma dual-frequency plasma electron temperature electron density Technology T Engineering (General). Civil engineering (General) TA1-2040 Biology (General) QH301-705.5 Physics QC1-999 Chemistry QD1-999 Chi Chen Wenjie Fu Chaoyang Zhang Dun Lu Meng Han Yang Yan Dual-Frequency Microwave Plasma Source Based on Microwave Coaxial Transmission Line
description	A dual-frequency plasma source has many advantages in applications. In this paper, a dual-frequency microwave plasma source is presented. This microwave plasma source is based on a coaxial transmission line without the resonator, and it can be operated in a wide band frequency region. Two microwaves are inputted from two ports into the plasma reactor: one is used firstly to excite the plasma and the other one is used to adjust plasma characteristics. Based on the COMSOL Multiphysics simulation, the experiment is carried out. In the experimental investigation, the plasma electron density and electron temperature can be controlled, respectively, by feeding in different frequencies from the second port, causing the particles at different energy levels to present different frequencies. This exploratory research improves the operation frequency of dual-frequency microwave plasma sources from RF to microwave.
format	article
author	Chi Chen Wenjie Fu Chaoyang Zhang Dun Lu Meng Han Yang Yan
author_facet	Chi Chen Wenjie Fu Chaoyang Zhang Dun Lu Meng Han Yang Yan
author_sort	Chi Chen
title	Dual-Frequency Microwave Plasma Source Based on Microwave Coaxial Transmission Line
title_short	Dual-Frequency Microwave Plasma Source Based on Microwave Coaxial Transmission Line
title_full	Dual-Frequency Microwave Plasma Source Based on Microwave Coaxial Transmission Line
title_fullStr	Dual-Frequency Microwave Plasma Source Based on Microwave Coaxial Transmission Line
title_full_unstemmed	Dual-Frequency Microwave Plasma Source Based on Microwave Coaxial Transmission Line
title_sort	dual-frequency microwave plasma source based on microwave coaxial transmission line
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/0e2e7cfbcb80424d8f59848b26bbda9f
work_keys_str_mv	AT chichen dualfrequencymicrowaveplasmasourcebasedonmicrowavecoaxialtransmissionline AT wenjiefu dualfrequencymicrowaveplasmasourcebasedonmicrowavecoaxialtransmissionline AT chaoyangzhang dualfrequencymicrowaveplasmasourcebasedonmicrowavecoaxialtransmissionline AT dunlu dualfrequencymicrowaveplasmasourcebasedonmicrowavecoaxialtransmissionline AT menghan dualfrequencymicrowaveplasmasourcebasedonmicrowavecoaxialtransmissionline AT yangyan dualfrequencymicrowaveplasmasourcebasedonmicrowavecoaxialtransmissionline
_version_	1718437860776869888

Dual-Frequency Microwave Plasma Source Based on Microwave Coaxial Transmission Line

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