Analysis of Inductive Displacement Sensors with Large Range and Nanoscale Resolution

With the advantages of high resolution, structural simplicity, reliability, compact size, and high sensitivity, inductive sensors have been widely used in nanopositioning systems. However, the measuring range of traditional inductive sensors are usually limited to 0.2 mm. A novel analysis and design...

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Autores principales:	Qiang He, Shixun Fan, Ning Chen, Ruoyu Tan, Fan Chen, Dapeng Fan
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	inductive sensor nanopositioning large range design method nanoscale resolution Technology T Engineering (General). Civil engineering (General) TA1-2040 Biology (General) QH301-705.5 Physics QC1-999 Chemistry QD1-999
Acceso en línea:	https://doaj.org/article/0ed30d0388f0498f876e5ec76ba2549a
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id	oai:doaj.org-article:0ed30d0388f0498f876e5ec76ba2549a
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spelling	oai:doaj.org-article:0ed30d0388f0498f876e5ec76ba2549a2021-11-11T15:11:50ZAnalysis of Inductive Displacement Sensors with Large Range and Nanoscale Resolution10.3390/app1121101342076-3417https://doaj.org/article/0ed30d0388f0498f876e5ec76ba2549a2021-10-01T00:00:00Zhttps://www.mdpi.com/2076-3417/11/21/10134https://doaj.org/toc/2076-3417With the advantages of high resolution, structural simplicity, reliability, compact size, and high sensitivity, inductive sensors have been widely used in nanopositioning systems. However, the measuring range of traditional inductive sensors are usually limited to 0.2 mm. A novel analysis and design methodology of the miniaturized inductive sensor with large measuring range and nanoscale resolution is proposed. Firstly, an accurate leakage inductance model is established. Secondly, a design rule of armature size is proposed by considering the fringing effect. Then, the error terms introduced by the measurement circuit of differential inductive sensors are analyzed and the corresponding error suppression methods are illustrated. Moreover, A design rule of selecting the optimal excitation frequency is proposed to meet the requirements of high <i>Q</i> value and high bandwidth, and to minimize the impact of core loss resistance on the performance of the sensor. Validated by the experiments, the proposed analysis and design method can effectively guide the design of the miniaturized inductive sensor with nanoscale resolution in the measuring range of ±0.5 mm. The overall size of the fabricated sensor prototypes is less than 6 mm × 6 mm × 3 mm. Combined with large range, high resolution and ideal miniaturization, this inductive sensor can be well suitable for compact and large stroke nanopositioning systems.Qiang HeShixun FanNing ChenRuoyu TanFan ChenDapeng FanMDPI AGarticleinductive sensornanopositioninglarge rangedesign methodnanoscale resolutionTechnologyTEngineering (General). Civil engineering (General)TA1-2040Biology (General)QH301-705.5PhysicsQC1-999ChemistryQD1-999ENApplied Sciences, Vol 11, Iss 10134, p 10134 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	inductive sensor nanopositioning large range design method nanoscale resolution Technology T Engineering (General). Civil engineering (General) TA1-2040 Biology (General) QH301-705.5 Physics QC1-999 Chemistry QD1-999
spellingShingle	inductive sensor nanopositioning large range design method nanoscale resolution Technology T Engineering (General). Civil engineering (General) TA1-2040 Biology (General) QH301-705.5 Physics QC1-999 Chemistry QD1-999 Qiang He Shixun Fan Ning Chen Ruoyu Tan Fan Chen Dapeng Fan Analysis of Inductive Displacement Sensors with Large Range and Nanoscale Resolution
description	With the advantages of high resolution, structural simplicity, reliability, compact size, and high sensitivity, inductive sensors have been widely used in nanopositioning systems. However, the measuring range of traditional inductive sensors are usually limited to 0.2 mm. A novel analysis and design methodology of the miniaturized inductive sensor with large measuring range and nanoscale resolution is proposed. Firstly, an accurate leakage inductance model is established. Secondly, a design rule of armature size is proposed by considering the fringing effect. Then, the error terms introduced by the measurement circuit of differential inductive sensors are analyzed and the corresponding error suppression methods are illustrated. Moreover, A design rule of selecting the optimal excitation frequency is proposed to meet the requirements of high <i>Q</i> value and high bandwidth, and to minimize the impact of core loss resistance on the performance of the sensor. Validated by the experiments, the proposed analysis and design method can effectively guide the design of the miniaturized inductive sensor with nanoscale resolution in the measuring range of ±0.5 mm. The overall size of the fabricated sensor prototypes is less than 6 mm × 6 mm × 3 mm. Combined with large range, high resolution and ideal miniaturization, this inductive sensor can be well suitable for compact and large stroke nanopositioning systems.
format	article
author	Qiang He Shixun Fan Ning Chen Ruoyu Tan Fan Chen Dapeng Fan
author_facet	Qiang He Shixun Fan Ning Chen Ruoyu Tan Fan Chen Dapeng Fan
author_sort	Qiang He
title	Analysis of Inductive Displacement Sensors with Large Range and Nanoscale Resolution
title_short	Analysis of Inductive Displacement Sensors with Large Range and Nanoscale Resolution
title_full	Analysis of Inductive Displacement Sensors with Large Range and Nanoscale Resolution
title_fullStr	Analysis of Inductive Displacement Sensors with Large Range and Nanoscale Resolution
title_full_unstemmed	Analysis of Inductive Displacement Sensors with Large Range and Nanoscale Resolution
title_sort	analysis of inductive displacement sensors with large range and nanoscale resolution
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/0ed30d0388f0498f876e5ec76ba2549a
work_keys_str_mv	AT qianghe analysisofinductivedisplacementsensorswithlargerangeandnanoscaleresolution AT shixunfan analysisofinductivedisplacementsensorswithlargerangeandnanoscaleresolution AT ningchen analysisofinductivedisplacementsensorswithlargerangeandnanoscaleresolution AT ruoyutan analysisofinductivedisplacementsensorswithlargerangeandnanoscaleresolution AT fanchen analysisofinductivedisplacementsensorswithlargerangeandnanoscaleresolution AT dapengfan analysisofinductivedisplacementsensorswithlargerangeandnanoscaleresolution
_version_	1718436722575933440

Analysis of Inductive Displacement Sensors with Large Range and Nanoscale Resolution

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