Growth of 100 mm indium antimonide single crystals by modified Czochralski technique

Currently there is a worldwide trend to increase the diameter of crystals grown from elemental semiconductors and semiconductor compounds. According to literary data the diameter of 3–5 semiconductor single crystals grown nowadays is 4 to 6 inches. So far up to 75 mm indium antimonide single crystal...

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Autores principales: Roman Yu. Kozlov, Svetlana S. Kormilitsina, Elena V. Molodtsova, Eugene O. Zhuravlev
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Lenguaje:EN
Publicado: Pensoft Publishers 2021
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Acceso en línea:https://doaj.org/article/101f3ebc0ecb45bc8621c949723eb041
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spelling oai:doaj.org-article:101f3ebc0ecb45bc8621c949723eb0412021-11-24T04:30:46ZGrowth of 100 mm indium antimonide single crystals by modified Czochralski technique10.3897/j.moem.7.2.762862452-1779https://doaj.org/article/101f3ebc0ecb45bc8621c949723eb0412021-06-01T00:00:00Zhttps://moem.pensoft.net/article/76286/download/pdf/https://moem.pensoft.net/article/76286/download/xml/https://moem.pensoft.net/article/76286/https://doaj.org/toc/2452-1779Currently there is a worldwide trend to increase the diameter of crystals grown from elemental semiconductors and semiconductor compounds. According to literary data the diameter of 3–5 semiconductor single crystals grown nowadays is 4 to 6 inches. So far up to 75 mm indium antimonide single crystals have been grown in Russia. Indium antimonide is the element base for the widest field of solid state electronics, i.e., optoelectronics. Indium antimonide is used for the fabrication of 3–5 mm range linear photodetectors and photodetector arrays used as light-sensitive material in heat vision systems. Growth heat conditions have been selected and 100 mm [100] indium antimonide single crystals have been grown using the modified two-stage Czochralski technique. The graphite heating unit has been oversized to accommodate a 150 mm crucible and a 4.5–5 kg load. The results of the work have provided for a substantial increase in the yield of photodetectors. The electrophysical properties of the as-grown single crystals have been studied using the Van der Pau method and proved to be in agreement with the standard parameters of undoped indium antimonide. Using the 9-field etch method of pit counting under an optical microscope the dislocation density in the 100 mm single crystals has been measured to be ≤ 100 cm-2which is similar to that for 50 mm single crystals.Roman Yu. KozlovSvetlana S. KormilitsinaElena V. MolodtsovaEugene O. ZhuravlevPensoft PublishersarticleElectronicsTK7800-8360ENModern Electronic Materials, Vol 7, Iss 2, Pp 73-78 (2021)
institution DOAJ
collection DOAJ
language EN
topic Electronics
TK7800-8360
spellingShingle Electronics
TK7800-8360
Roman Yu. Kozlov
Svetlana S. Kormilitsina
Elena V. Molodtsova
Eugene O. Zhuravlev
Growth of 100 mm indium antimonide single crystals by modified Czochralski technique
description Currently there is a worldwide trend to increase the diameter of crystals grown from elemental semiconductors and semiconductor compounds. According to literary data the diameter of 3–5 semiconductor single crystals grown nowadays is 4 to 6 inches. So far up to 75 mm indium antimonide single crystals have been grown in Russia. Indium antimonide is the element base for the widest field of solid state electronics, i.e., optoelectronics. Indium antimonide is used for the fabrication of 3–5 mm range linear photodetectors and photodetector arrays used as light-sensitive material in heat vision systems. Growth heat conditions have been selected and 100 mm [100] indium antimonide single crystals have been grown using the modified two-stage Czochralski technique. The graphite heating unit has been oversized to accommodate a 150 mm crucible and a 4.5–5 kg load. The results of the work have provided for a substantial increase in the yield of photodetectors. The electrophysical properties of the as-grown single crystals have been studied using the Van der Pau method and proved to be in agreement with the standard parameters of undoped indium antimonide. Using the 9-field etch method of pit counting under an optical microscope the dislocation density in the 100 mm single crystals has been measured to be ≤ 100 cm-2which is similar to that for 50 mm single crystals.
format article
author Roman Yu. Kozlov
Svetlana S. Kormilitsina
Elena V. Molodtsova
Eugene O. Zhuravlev
author_facet Roman Yu. Kozlov
Svetlana S. Kormilitsina
Elena V. Molodtsova
Eugene O. Zhuravlev
author_sort Roman Yu. Kozlov
title Growth of 100 mm indium antimonide single crystals by modified Czochralski technique
title_short Growth of 100 mm indium antimonide single crystals by modified Czochralski technique
title_full Growth of 100 mm indium antimonide single crystals by modified Czochralski technique
title_fullStr Growth of 100 mm indium antimonide single crystals by modified Czochralski technique
title_full_unstemmed Growth of 100 mm indium antimonide single crystals by modified Czochralski technique
title_sort growth of 100 mm indium antimonide single crystals by modified czochralski technique
publisher Pensoft Publishers
publishDate 2021
url https://doaj.org/article/101f3ebc0ecb45bc8621c949723eb041
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