Control method of applied voltage for fabricating micro-pattern using near-field electrohydrodynamic direct-writing technology

In the process of fabricating micro-patterns using the near-field electrohydrodynamic (EHD) direct-writing technology, the voltage error and the dynamic responsiveness of applied voltage have an effect on the jetting shape and the direct-writing pattern. To solve these problems, an iterative control...

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Autores principales:	Ting Wu, Libing Zhang, Haijun Song
Formato:	article
Lenguaje:	EN
Publicado:	AIP Publishing LLC 2021
Materias:	Physics QC1-999
Acceso en línea:	https://doaj.org/article/1053fb4569da4b82b8acf477a28f444c
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spelling	oai:doaj.org-article:1053fb4569da4b82b8acf477a28f444c2021-12-01T18:52:06ZControl method of applied voltage for fabricating micro-pattern using near-field electrohydrodynamic direct-writing technology2158-322610.1063/5.0074069https://doaj.org/article/1053fb4569da4b82b8acf477a28f444c2021-11-01T00:00:00Zhttp://dx.doi.org/10.1063/5.0074069https://doaj.org/toc/2158-3226In the process of fabricating micro-patterns using the near-field electrohydrodynamic (EHD) direct-writing technology, the voltage error and the dynamic responsiveness of applied voltage have an effect on the jetting shape and the direct-writing pattern. To solve these problems, an iterative control method was proposed to compensate the voltage error between the expected voltage and the actual voltage of the near-field EHD direct-writing setup, which was controlled by the idea of iteration, and a control method based on feedforward and feedback was proposed to enhance the dynamic response of applied voltage in the process of the near-field EHD direct-writing micro-pattern, which was controlled by the idea of the feedforward and feedback. Software algorithms of the voltage error compensation and improved dynamic response of applied voltage were implemented in the near-field EHD direct-writing setup. The experimental results show that the proposed method of voltage error compensation can effectively improve the precision of applied voltage and the presented control method of improving dynamic response capability can effectively shorten the delay time of applied voltage. Finally, two groups of contrast experiments were carried out in the near-field EHD direct-writing equipment, and the experimental results demonstrate that the proposed control methods can effectively improve the jetting shape and the quality of the direct-writing micro-pattern.Ting WuLibing ZhangHaijun SongAIP Publishing LLCarticlePhysicsQC1-999ENAIP Advances, Vol 11, Iss 11, Pp 115120-115120-8 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Physics QC1-999
spellingShingle	Physics QC1-999 Ting Wu Libing Zhang Haijun Song Control method of applied voltage for fabricating micro-pattern using near-field electrohydrodynamic direct-writing technology
description	In the process of fabricating micro-patterns using the near-field electrohydrodynamic (EHD) direct-writing technology, the voltage error and the dynamic responsiveness of applied voltage have an effect on the jetting shape and the direct-writing pattern. To solve these problems, an iterative control method was proposed to compensate the voltage error between the expected voltage and the actual voltage of the near-field EHD direct-writing setup, which was controlled by the idea of iteration, and a control method based on feedforward and feedback was proposed to enhance the dynamic response of applied voltage in the process of the near-field EHD direct-writing micro-pattern, which was controlled by the idea of the feedforward and feedback. Software algorithms of the voltage error compensation and improved dynamic response of applied voltage were implemented in the near-field EHD direct-writing setup. The experimental results show that the proposed method of voltage error compensation can effectively improve the precision of applied voltage and the presented control method of improving dynamic response capability can effectively shorten the delay time of applied voltage. Finally, two groups of contrast experiments were carried out in the near-field EHD direct-writing equipment, and the experimental results demonstrate that the proposed control methods can effectively improve the jetting shape and the quality of the direct-writing micro-pattern.
format	article
author	Ting Wu Libing Zhang Haijun Song
author_facet	Ting Wu Libing Zhang Haijun Song
author_sort	Ting Wu
title	Control method of applied voltage for fabricating micro-pattern using near-field electrohydrodynamic direct-writing technology
title_short	Control method of applied voltage for fabricating micro-pattern using near-field electrohydrodynamic direct-writing technology
title_full	Control method of applied voltage for fabricating micro-pattern using near-field electrohydrodynamic direct-writing technology
title_fullStr	Control method of applied voltage for fabricating micro-pattern using near-field electrohydrodynamic direct-writing technology
title_full_unstemmed	Control method of applied voltage for fabricating micro-pattern using near-field electrohydrodynamic direct-writing technology
title_sort	control method of applied voltage for fabricating micro-pattern using near-field electrohydrodynamic direct-writing technology
publisher	AIP Publishing LLC
publishDate	2021
url	https://doaj.org/article/1053fb4569da4b82b8acf477a28f444c
work_keys_str_mv	AT tingwu controlmethodofappliedvoltageforfabricatingmicropatternusingnearfieldelectrohydrodynamicdirectwritingtechnology AT libingzhang controlmethodofappliedvoltageforfabricatingmicropatternusingnearfieldelectrohydrodynamicdirectwritingtechnology AT haijunsong controlmethodofappliedvoltageforfabricatingmicropatternusingnearfieldelectrohydrodynamicdirectwritingtechnology
_version_	1718404675034677248

Control method of applied voltage for fabricating micro-pattern using near-field electrohydrodynamic direct-writing technology

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