Fast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application

MEMS-based LiDAR (micro-electro–mechanical system based light detection and ranging), with a low cost and small volume, becomes a promising solution for the two-dimensional (2D) and three-dimensional (3D) optical imaging. A semi-coaxial MEMS LiDAR design, based on a synchronous MEMS mirror pair, was...

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Autores principales:	Fahu Xu, Dayong Qiao, Changfeng Xia, Xiumin Song, Yaojun He
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	MEMS LiDAR MEMS mirror pair synchronization method Mechanical engineering and machinery TJ1-1570
Acceso en línea:	https://doaj.org/article/10a1175a715f49c79edf8436d9cd452e
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id	oai:doaj.org-article:10a1175a715f49c79edf8436d9cd452e
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spelling	oai:doaj.org-article:10a1175a715f49c79edf8436d9cd452e2021-11-25T18:22:50ZFast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application10.3390/mi121112922072-666Xhttps://doaj.org/article/10a1175a715f49c79edf8436d9cd452e2021-10-01T00:00:00Zhttps://www.mdpi.com/2072-666X/12/11/1292https://doaj.org/toc/2072-666XMEMS-based LiDAR (micro-electro–mechanical system based light detection and ranging), with a low cost and small volume, becomes a promising solution for the two-dimensional (2D) and three-dimensional (3D) optical imaging. A semi-coaxial MEMS LiDAR design, based on a synchronous MEMS mirror pair, was proposed in our early study. In this paper, we specifically reveal the synchronization method of the comb-actuated MEMS mirror pair, including the frequency, amplitude, and phase synchronization. The frequency sweeping and phase adjustment are simultaneously implemented to accelerate the MEMS mirror synchronization process. The experiment is set up and the entire synchronization process is completed within 5 s. Eventually, a one-beam MEMS LiDAR system with the synchronous MEMS mirror pair is set up and a LiDAR with a field of view (FOV) of 60°, angular resolution of 0.2°, and frame rate of 360 Hz is obtained. The experimental results verify the feasibility of the MEMS mirror synchronization method and show a promising potential application prospect for the MEMS LiDAR system.Fahu XuDayong QiaoChangfeng XiaXiumin SongYaojun HeMDPI AGarticleMEMS LiDARMEMS mirror pairsynchronization methodMechanical engineering and machineryTJ1-1570ENMicromachines, Vol 12, Iss 1292, p 1292 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	MEMS LiDAR MEMS mirror pair synchronization method Mechanical engineering and machinery TJ1-1570
spellingShingle	MEMS LiDAR MEMS mirror pair synchronization method Mechanical engineering and machinery TJ1-1570 Fahu Xu Dayong Qiao Changfeng Xia Xiumin Song Yaojun He Fast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application
description	MEMS-based LiDAR (micro-electro–mechanical system based light detection and ranging), with a low cost and small volume, becomes a promising solution for the two-dimensional (2D) and three-dimensional (3D) optical imaging. A semi-coaxial MEMS LiDAR design, based on a synchronous MEMS mirror pair, was proposed in our early study. In this paper, we specifically reveal the synchronization method of the comb-actuated MEMS mirror pair, including the frequency, amplitude, and phase synchronization. The frequency sweeping and phase adjustment are simultaneously implemented to accelerate the MEMS mirror synchronization process. The experiment is set up and the entire synchronization process is completed within 5 s. Eventually, a one-beam MEMS LiDAR system with the synchronous MEMS mirror pair is set up and a LiDAR with a field of view (FOV) of 60°, angular resolution of 0.2°, and frame rate of 360 Hz is obtained. The experimental results verify the feasibility of the MEMS mirror synchronization method and show a promising potential application prospect for the MEMS LiDAR system.
format	article
author	Fahu Xu Dayong Qiao Changfeng Xia Xiumin Song Yaojun He
author_facet	Fahu Xu Dayong Qiao Changfeng Xia Xiumin Song Yaojun He
author_sort	Fahu Xu
title	Fast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application
title_short	Fast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application
title_full	Fast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application
title_fullStr	Fast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application
title_full_unstemmed	Fast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application
title_sort	fast synchronization method of comb-actuated mems mirror pair for lidar application
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/10a1175a715f49c79edf8436d9cd452e
work_keys_str_mv	AT fahuxu fastsynchronizationmethodofcombactuatedmemsmirrorpairforlidarapplication AT dayongqiao fastsynchronizationmethodofcombactuatedmemsmirrorpairforlidarapplication AT changfengxia fastsynchronizationmethodofcombactuatedmemsmirrorpairforlidarapplication AT xiuminsong fastsynchronizationmethodofcombactuatedmemsmirrorpairforlidarapplication AT yaojunhe fastsynchronizationmethodofcombactuatedmemsmirrorpairforlidarapplication
_version_	1718411241366487040

Fast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application

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