Fast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application

MEMS-based LiDAR (micro-electro–mechanical system based light detection and ranging), with a low cost and small volume, becomes a promising solution for the two-dimensional (2D) and three-dimensional (3D) optical imaging. A semi-coaxial MEMS LiDAR design, based on a synchronous MEMS mirror pair, was...

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Autores principales: Fahu Xu, Dayong Qiao, Changfeng Xia, Xiumin Song, Yaojun He
Formato: article
Lenguaje:EN
Publicado: MDPI AG 2021
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Acceso en línea:https://doaj.org/article/10a1175a715f49c79edf8436d9cd452e
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