Rate-dependent indentation size effect on hardness and creep behavior of a titanium metallization film on alumina substrate
Nanoindentation tests were performed at room temperature to investigate the indentation size effect (ISE) and creep behavior of a titanium metallization film on alumina substrate. The ISE of hardness was examined at different loading strain rate (LSR). The effects of LSR and penetrating depth on nan...
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2021
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oai:doaj.org-article:10b94663a8484b78a93bba7fefc695922021-11-04T04:32:12ZRate-dependent indentation size effect on hardness and creep behavior of a titanium metallization film on alumina substrate2238-785410.1016/j.jmrt.2021.10.101https://doaj.org/article/10b94663a8484b78a93bba7fefc695922021-11-01T00:00:00Zhttp://www.sciencedirect.com/science/article/pii/S2238785421012370https://doaj.org/toc/2238-7854Nanoindentation tests were performed at room temperature to investigate the indentation size effect (ISE) and creep behavior of a titanium metallization film on alumina substrate. The ISE of hardness was examined at different loading strain rate (LSR). The effects of LSR and penetrating depth on nanoindentation creep were evaluated at the steady creep state. Inverse ISE in titanium film was observed at indentation depth below 200 nm while normal ISE was observed at penetrating depth ranging from 200 nm to 1000 nm. Elastic contact theory and strain gradient plasticity theory were applied to interpret the variation trends of hardness respectively. In addition, the intrinsic hardness and characteristic length were found to be strongly dependent on LSR. Except for creep strain rate, creep displacement and creep stress exponent showed relatively conspicuous correlations to LSR and/or penetrating depths.Xuegang XingYongsheng WangGesheng XiaoShengwang YuYongsheng MaXuefeng ShuYucheng WuElsevierarticleIndentation size effectCreepStrain rate sensitivityFilm/substrate systemMining engineering. MetallurgyTN1-997ENJournal of Materials Research and Technology, Vol 15, Iss , Pp 4662-4671 (2021) |
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DOAJ |
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Indentation size effect Creep Strain rate sensitivity Film/substrate system Mining engineering. Metallurgy TN1-997 |
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Indentation size effect Creep Strain rate sensitivity Film/substrate system Mining engineering. Metallurgy TN1-997 Xuegang Xing Yongsheng Wang Gesheng Xiao Shengwang Yu Yongsheng Ma Xuefeng Shu Yucheng Wu Rate-dependent indentation size effect on hardness and creep behavior of a titanium metallization film on alumina substrate |
description |
Nanoindentation tests were performed at room temperature to investigate the indentation size effect (ISE) and creep behavior of a titanium metallization film on alumina substrate. The ISE of hardness was examined at different loading strain rate (LSR). The effects of LSR and penetrating depth on nanoindentation creep were evaluated at the steady creep state. Inverse ISE in titanium film was observed at indentation depth below 200 nm while normal ISE was observed at penetrating depth ranging from 200 nm to 1000 nm. Elastic contact theory and strain gradient plasticity theory were applied to interpret the variation trends of hardness respectively. In addition, the intrinsic hardness and characteristic length were found to be strongly dependent on LSR. Except for creep strain rate, creep displacement and creep stress exponent showed relatively conspicuous correlations to LSR and/or penetrating depths. |
format |
article |
author |
Xuegang Xing Yongsheng Wang Gesheng Xiao Shengwang Yu Yongsheng Ma Xuefeng Shu Yucheng Wu |
author_facet |
Xuegang Xing Yongsheng Wang Gesheng Xiao Shengwang Yu Yongsheng Ma Xuefeng Shu Yucheng Wu |
author_sort |
Xuegang Xing |
title |
Rate-dependent indentation size effect on hardness and creep behavior of a titanium metallization film on alumina substrate |
title_short |
Rate-dependent indentation size effect on hardness and creep behavior of a titanium metallization film on alumina substrate |
title_full |
Rate-dependent indentation size effect on hardness and creep behavior of a titanium metallization film on alumina substrate |
title_fullStr |
Rate-dependent indentation size effect on hardness and creep behavior of a titanium metallization film on alumina substrate |
title_full_unstemmed |
Rate-dependent indentation size effect on hardness and creep behavior of a titanium metallization film on alumina substrate |
title_sort |
rate-dependent indentation size effect on hardness and creep behavior of a titanium metallization film on alumina substrate |
publisher |
Elsevier |
publishDate |
2021 |
url |
https://doaj.org/article/10b94663a8484b78a93bba7fefc69592 |
work_keys_str_mv |
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