Electron Information in Single- and Dual-Frequency Capacitive Discharges at Atmospheric Pressure

Abstract Determining the electron properties of weakly ionized gases, particularly in a high electron-neutral collisional condition, is a nontrivial task; thus, the mechanisms underlying the electron characteristics and electron heating structure in radio-frequency (rf) collisional discharges remain...

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Autores principales:	Sanghoo Park, Wonho Choe, Se Youn Moon, Jian Jun Shi
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2018
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/12335f522dc34f6fb59682fb16bd9026
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spelling	oai:doaj.org-article:12335f522dc34f6fb59682fb16bd90262021-12-02T15:08:16ZElectron Information in Single- and Dual-Frequency Capacitive Discharges at Atmospheric Pressure10.1038/s41598-018-25892-w2045-2322https://doaj.org/article/12335f522dc34f6fb59682fb16bd90262018-05-01T00:00:00Zhttps://doi.org/10.1038/s41598-018-25892-whttps://doaj.org/toc/2045-2322Abstract Determining the electron properties of weakly ionized gases, particularly in a high electron-neutral collisional condition, is a nontrivial task; thus, the mechanisms underlying the electron characteristics and electron heating structure in radio-frequency (rf) collisional discharges remain unclear. Here, we report the electrical characteristics and electron information in single-frequency (4.52 MHz and 13.56 MHz) and dual-frequency (a combination of 4.52 MHz and 13.56 MHz) capacitive discharges within the abnormal α-mode regime at atmospheric pressure. A continuum radiation-based electron diagnostic method is employed to estimate the electron density (n e) and temperature (T e). Our experimental observations reveal that time-averaged n e (7.7–14 × 1011 cm−3) and T e (1.75–2.5 eV) can be independently controlled in dual-frequency discharge, whereas such control is nontrivial in single-frequency discharge, which shows a linear increase in n e and little to no change in T e with increases in the rf input power. Furthermore, the two-dimensional spatiotemporal evolution of neutral bremsstrahlung and associated electron heating structures is demonstrated. These results reveal that a symmetric structure in electron heating becomes asymmetric (via a local suppression of electron temperature) as two-frequency power is simultaneously introduced.Sanghoo ParkWonho ChoeSe Youn MoonJian Jun ShiNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 8, Iss 1, Pp 1-10 (2018)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Sanghoo Park Wonho Choe Se Youn Moon Jian Jun Shi Electron Information in Single- and Dual-Frequency Capacitive Discharges at Atmospheric Pressure
description	Abstract Determining the electron properties of weakly ionized gases, particularly in a high electron-neutral collisional condition, is a nontrivial task; thus, the mechanisms underlying the electron characteristics and electron heating structure in radio-frequency (rf) collisional discharges remain unclear. Here, we report the electrical characteristics and electron information in single-frequency (4.52 MHz and 13.56 MHz) and dual-frequency (a combination of 4.52 MHz and 13.56 MHz) capacitive discharges within the abnormal α-mode regime at atmospheric pressure. A continuum radiation-based electron diagnostic method is employed to estimate the electron density (n e) and temperature (T e). Our experimental observations reveal that time-averaged n e (7.7–14 × 1011 cm−3) and T e (1.75–2.5 eV) can be independently controlled in dual-frequency discharge, whereas such control is nontrivial in single-frequency discharge, which shows a linear increase in n e and little to no change in T e with increases in the rf input power. Furthermore, the two-dimensional spatiotemporal evolution of neutral bremsstrahlung and associated electron heating structures is demonstrated. These results reveal that a symmetric structure in electron heating becomes asymmetric (via a local suppression of electron temperature) as two-frequency power is simultaneously introduced.
format	article
author	Sanghoo Park Wonho Choe Se Youn Moon Jian Jun Shi
author_facet	Sanghoo Park Wonho Choe Se Youn Moon Jian Jun Shi
author_sort	Sanghoo Park
title	Electron Information in Single- and Dual-Frequency Capacitive Discharges at Atmospheric Pressure
title_short	Electron Information in Single- and Dual-Frequency Capacitive Discharges at Atmospheric Pressure
title_full	Electron Information in Single- and Dual-Frequency Capacitive Discharges at Atmospheric Pressure
title_fullStr	Electron Information in Single- and Dual-Frequency Capacitive Discharges at Atmospheric Pressure
title_full_unstemmed	Electron Information in Single- and Dual-Frequency Capacitive Discharges at Atmospheric Pressure
title_sort	electron information in single- and dual-frequency capacitive discharges at atmospheric pressure
publisher	Nature Portfolio
publishDate	2018
url	https://doaj.org/article/12335f522dc34f6fb59682fb16bd9026
work_keys_str_mv	AT sanghoopark electroninformationinsingleanddualfrequencycapacitivedischargesatatmosphericpressure AT wonhochoe electroninformationinsingleanddualfrequencycapacitivedischargesatatmosphericpressure AT seyounmoon electroninformationinsingleanddualfrequencycapacitivedischargesatatmosphericpressure AT jianjunshi electroninformationinsingleanddualfrequencycapacitivedischargesatatmosphericpressure
_version_	1718388170509254656

Electron Information in Single- and Dual-Frequency Capacitive Discharges at Atmospheric Pressure

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