Micro-Hole Drilling on Silicon Nitride Ceramics in Ethanol

Micro-hole drilling of engineering ceramics has potential for application to fuel injection nozzles and fiber spinning nozzles, etc. To date among engineering ceramics, less study has been reported on the micro-hole drilling of silicon nitride. We therefore conducted micro-hole drilling of hot-press...

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Autores principales:	Tsuneaki Yamabe, Yuji Enomoto, Takashi Kawamura, Yuko Hibi
Formato:	article
Lenguaje:	EN
Publicado:	Japanese Society of Tribologists 2009
Materias:	micro-hole drilling silicon nitride ceramics ethanol tribochemical reaction Physics QC1-999 Engineering (General). Civil engineering (General) TA1-2040 Mechanical engineering and machinery TJ1-1570 Chemistry QD1-999
Acceso en línea:	https://doaj.org/article/1264b23141d0439f9516d901380e35ee
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spelling	oai:doaj.org-article:1264b23141d0439f9516d901380e35ee2021-11-05T09:28:14ZMicro-Hole Drilling on Silicon Nitride Ceramics in Ethanol1881-219810.2474/trol.4.31https://doaj.org/article/1264b23141d0439f9516d901380e35ee2009-02-01T00:00:00Zhttps://www.jstage.jst.go.jp/article/trol/4/1/4_1_31/_pdf/-char/enhttps://doaj.org/toc/1881-2198Micro-hole drilling of engineering ceramics has potential for application to fuel injection nozzles and fiber spinning nozzles, etc. To date among engineering ceramics, less study has been reported on the micro-hole drilling of silicon nitride. We therefore conducted micro-hole drilling of hot-pressed silicon nitride using a chemical vapor deposition (CVD) diamond-coated tool with ethanol as the cutting fluid. As a result, the successful drilling of silicon nitride was achieved with a smooth drilled surface and sufficient accuracy of the hole size. Wear damage of the CVD coated diamond tool and drilling debris of silicon nitride were investigated using scanning electron microscopy (SEM) with energy-dispersive X-ray spectroscopy (EDX). As a result, it is suggested that tribochemical reaction of silicon nitride effectively contributed to the micro-hole drilling characteristics; that is, smoother hole surface was obtained due to the polishing action of wear debris and tribochemical reaction products. The hole inlet size, varied during successive drilling process, could be explained in relation to the wear damage of the diamond-coated drill tip.Tsuneaki YamabeYuji EnomotoTakashi KawamuraYuko HibiJapanese Society of Tribologistsarticlemicro-hole drillingsilicon nitrideceramicsethanoltribochemical reactionPhysicsQC1-999Engineering (General). Civil engineering (General)TA1-2040Mechanical engineering and machineryTJ1-1570ChemistryQD1-999ENTribology Online, Vol 4, Iss 1, Pp 31-35 (2009)
institution	DOAJ
collection	DOAJ
language	EN
topic	micro-hole drilling silicon nitride ceramics ethanol tribochemical reaction Physics QC1-999 Engineering (General). Civil engineering (General) TA1-2040 Mechanical engineering and machinery TJ1-1570 Chemistry QD1-999
spellingShingle	micro-hole drilling silicon nitride ceramics ethanol tribochemical reaction Physics QC1-999 Engineering (General). Civil engineering (General) TA1-2040 Mechanical engineering and machinery TJ1-1570 Chemistry QD1-999 Tsuneaki Yamabe Yuji Enomoto Takashi Kawamura Yuko Hibi Micro-Hole Drilling on Silicon Nitride Ceramics in Ethanol
description	Micro-hole drilling of engineering ceramics has potential for application to fuel injection nozzles and fiber spinning nozzles, etc. To date among engineering ceramics, less study has been reported on the micro-hole drilling of silicon nitride. We therefore conducted micro-hole drilling of hot-pressed silicon nitride using a chemical vapor deposition (CVD) diamond-coated tool with ethanol as the cutting fluid. As a result, the successful drilling of silicon nitride was achieved with a smooth drilled surface and sufficient accuracy of the hole size. Wear damage of the CVD coated diamond tool and drilling debris of silicon nitride were investigated using scanning electron microscopy (SEM) with energy-dispersive X-ray spectroscopy (EDX). As a result, it is suggested that tribochemical reaction of silicon nitride effectively contributed to the micro-hole drilling characteristics; that is, smoother hole surface was obtained due to the polishing action of wear debris and tribochemical reaction products. The hole inlet size, varied during successive drilling process, could be explained in relation to the wear damage of the diamond-coated drill tip.
format	article
author	Tsuneaki Yamabe Yuji Enomoto Takashi Kawamura Yuko Hibi
author_facet	Tsuneaki Yamabe Yuji Enomoto Takashi Kawamura Yuko Hibi
author_sort	Tsuneaki Yamabe
title	Micro-Hole Drilling on Silicon Nitride Ceramics in Ethanol
title_short	Micro-Hole Drilling on Silicon Nitride Ceramics in Ethanol
title_full	Micro-Hole Drilling on Silicon Nitride Ceramics in Ethanol
title_fullStr	Micro-Hole Drilling on Silicon Nitride Ceramics in Ethanol
title_full_unstemmed	Micro-Hole Drilling on Silicon Nitride Ceramics in Ethanol
title_sort	micro-hole drilling on silicon nitride ceramics in ethanol
publisher	Japanese Society of Tribologists
publishDate	2009
url	https://doaj.org/article/1264b23141d0439f9516d901380e35ee
work_keys_str_mv	AT tsuneakiyamabe microholedrillingonsiliconnitrideceramicsinethanol AT yujienomoto microholedrillingonsiliconnitrideceramicsinethanol AT takashikawamura microholedrillingonsiliconnitrideceramicsinethanol AT yukohibi microholedrillingonsiliconnitrideceramicsinethanol
_version_	1718444330127982592

Micro-Hole Drilling on Silicon Nitride Ceramics in Ethanol

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