Room-Temperature Formation of Hard BC<sub>x</sub> Films by Low Power Magnetron Sputtering
Boron carbide is one of the most important non-metallic materials. Amorphous BC<sub>x</sub> films were synthesized at room temperature by single- and dual-target magnetron sputtering processes. A B<sub>4</sub>C target and C target were operated using an RF signal and a DC sig...
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| Autores principales: | , , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
MDPI AG
2021
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/1295ccf208ae4fe2b3732ca434279388 |
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