A Study on the Characteristic and Antibacterial Activity of Ti<sub>3</sub>O<sub>x</sub> Thin Films

A Study on the Characteristic and Antibacterial Activity of Ti<sub>3</sub>O<sub>x</sub> Thin Films

A pure Ti target in Ar/O<sub>2</sub> gas mixture was used to synthesize Ti<sub>3</sub>O<sub>x</sub> thin film on a glass substrate by Reactive High-Power Impulse Magnetron Sputtering (HiPIMS) under different sputtering power (2 and 2.5 kW). The influence of HiPIMS...

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Autores principales: Endrika Widyastuti, Fu-Yang Xu, Chen-Tien Chiu, Jhen-Hau Jan, Jue-Liang Hsu, Ying-Chieh Lee
Formato: article
Lenguaje:EN
Publicado: MDPI AG 2021
Materias:
Ti<sub>3</sub>O
Ti<sub>3</sub>O<sub>5</sub>
Magnéli-phase
<i>E. coli</i>
<i>S. aureus</i>
reactive-HiPIMS
Chemical technology
TP1-1185
Chemistry
QD1-999
Acceso en línea:https://doaj.org/article/12f42ff9a1b94298b54abc7c01b14e5b
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spelling oai:doaj.org-article:12f42ff9a1b94298b54abc7c01b14e5b2021-11-25T17:07:08ZA Study on the Characteristic and Antibacterial Activity of Ti<sub>3</sub>O<sub>x</sub> Thin Films10.3390/catal111114162073-4344https://doaj.org/article/12f42ff9a1b94298b54abc7c01b14e5b2021-11-01T00:00:00Zhttps://www.mdpi.com/2073-4344/11/11/1416https://doaj.org/toc/2073-4344A pure Ti target in Ar/O<sub>2</sub> gas mixture was used to synthesize Ti<sub>3</sub>O<sub>x</sub> thin film on a glass substrate by Reactive High-Power Impulse Magnetron Sputtering (HiPIMS) under different sputtering power (2 and 2.5 kW). The influence of HiPIMS parameters on thin films’ structural, morphological, chemical composition, optical and photocatalytic, and antibacterial properties was investigated. In this study, Ti<sub>3</sub>O<sub>x</sub> thin films can be synthesized using the HiPIMS method without the post-annealing process. Two co-existence phases (hexagonal Ti<sub>3</sub>O and base-centered monoclinic Ti<sub>3</sub>O<sub>5</sub> phases) existed on the Ti<sub>3</sub>O<sub>x</sub> films. It is found that the peak intensity of (006) Ti<sub>3</sub>O hexagonal slightly increased as the sputtering power increased from 2 to 2.5 kW. The Ti<sub>3</sub>O<sub>x</sub> thin-film bandgap values were 3.36 and 3.50 eV for 2 and 2.5 kW, respectively. The Ti<sub>3</sub>O<sub>x</sub> films deposited at 2.5 kW showed good photocatalytic activity under UV light irradiation, with a higher methylene blue dye degradation rate than TiO<sub>2</sub> thin films. The antibacterial study on Ti<sub>3</sub>O<sub>x</sub> thin films exhibited a high inhibition percentage against <i>E. coli</i> and <i>S. aureus</i>. This study demonstrates that Ti<sub>3</sub>O<sub>x</sub> thin films can promote high photocatalytic and antibacterial activity.Endrika WidyastutiFu-Yang XuChen-Tien ChiuJhen-Hau JanJue-Liang HsuYing-Chieh LeeMDPI AGarticleTi<sub>3</sub>OTi<sub>3</sub>O<sub>5</sub>Magnéli-phase<i>E. coli</i><i>S. aureus</i>reactive-HiPIMSChemical technologyTP1-1185ChemistryQD1-999ENCatalysts, Vol 11, Iss 1416, p 1416 (2021)
institution DOAJ
collection DOAJ
language EN
topic Ti<sub>3</sub>O
Ti<sub>3</sub>O<sub>5</sub>
Magnéli-phase
<i>E. coli</i>
<i>S. aureus</i>
reactive-HiPIMS
Chemical technology
TP1-1185
Chemistry
QD1-999
spellingShingle Ti<sub>3</sub>O
Ti<sub>3</sub>O<sub>5</sub>
Magnéli-phase
<i>E. coli</i>
<i>S. aureus</i>
reactive-HiPIMS
Chemical technology
TP1-1185
Chemistry
QD1-999
Endrika Widyastuti
Fu-Yang Xu
Chen-Tien Chiu
Jhen-Hau Jan
Jue-Liang Hsu
Ying-Chieh Lee
A Study on the Characteristic and Antibacterial Activity of Ti<sub>3</sub>O<sub>x</sub> Thin Films
description A pure Ti target in Ar/O<sub>2</sub> gas mixture was used to synthesize Ti<sub>3</sub>O<sub>x</sub> thin film on a glass substrate by Reactive High-Power Impulse Magnetron Sputtering (HiPIMS) under different sputtering power (2 and 2.5 kW). The influence of HiPIMS parameters on thin films’ structural, morphological, chemical composition, optical and photocatalytic, and antibacterial properties was investigated. In this study, Ti<sub>3</sub>O<sub>x</sub> thin films can be synthesized using the HiPIMS method without the post-annealing process. Two co-existence phases (hexagonal Ti<sub>3</sub>O and base-centered monoclinic Ti<sub>3</sub>O<sub>5</sub> phases) existed on the Ti<sub>3</sub>O<sub>x</sub> films. It is found that the peak intensity of (006) Ti<sub>3</sub>O hexagonal slightly increased as the sputtering power increased from 2 to 2.5 kW. The Ti<sub>3</sub>O<sub>x</sub> thin-film bandgap values were 3.36 and 3.50 eV for 2 and 2.5 kW, respectively. The Ti<sub>3</sub>O<sub>x</sub> films deposited at 2.5 kW showed good photocatalytic activity under UV light irradiation, with a higher methylene blue dye degradation rate than TiO<sub>2</sub> thin films. The antibacterial study on Ti<sub>3</sub>O<sub>x</sub> thin films exhibited a high inhibition percentage against <i>E. coli</i> and <i>S. aureus</i>. This study demonstrates that Ti<sub>3</sub>O<sub>x</sub> thin films can promote high photocatalytic and antibacterial activity.
format article
author Endrika Widyastuti
Fu-Yang Xu
Chen-Tien Chiu
Jhen-Hau Jan
Jue-Liang Hsu
Ying-Chieh Lee
author_facet Endrika Widyastuti
Fu-Yang Xu
Chen-Tien Chiu
Jhen-Hau Jan
Jue-Liang Hsu
Ying-Chieh Lee
author_sort Endrika Widyastuti
title A Study on the Characteristic and Antibacterial Activity of Ti<sub>3</sub>O<sub>x</sub> Thin Films
title_short A Study on the Characteristic and Antibacterial Activity of Ti<sub>3</sub>O<sub>x</sub> Thin Films
title_full A Study on the Characteristic and Antibacterial Activity of Ti<sub>3</sub>O<sub>x</sub> Thin Films
title_fullStr A Study on the Characteristic and Antibacterial Activity of Ti<sub>3</sub>O<sub>x</sub> Thin Films
title_full_unstemmed A Study on the Characteristic and Antibacterial Activity of Ti<sub>3</sub>O<sub>x</sub> Thin Films
title_sort study on the characteristic and antibacterial activity of ti<sub>3</sub>o<sub>x</sub> thin films
publisher MDPI AG
publishDate 2021
url https://doaj.org/article/12f42ff9a1b94298b54abc7c01b14e5b
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