A Study on the Characteristic and Antibacterial Activity of Ti<sub>3</sub>O<sub>x</sub> Thin Films

A Study on the Characteristic and Antibacterial Activity of Ti<sub>3</sub>O<sub>x</sub> Thin Films

A pure Ti target in Ar/O<sub>2</sub> gas mixture was used to synthesize Ti<sub>3</sub>O<sub>x</sub> thin film on a glass substrate by Reactive High-Power Impulse Magnetron Sputtering (HiPIMS) under different sputtering power (2 and 2.5 kW). The influence of HiPIMS...

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Detalles Bibliográficos
Autores principales: Endrika Widyastuti, Fu-Yang Xu, Chen-Tien Chiu, Jhen-Hau Jan, Jue-Liang Hsu, Ying-Chieh Lee
Formato: article
Lenguaje:EN
Publicado: MDPI AG 2021
Materias:
Ti<sub>3</sub>O
Ti<sub>3</sub>O<sub>5</sub>
Magnéli-phase
<i>E. coli</i>
<i>S. aureus</i>
reactive-HiPIMS
Chemical technology
TP1-1185
Chemistry
QD1-999
Acceso en línea:https://doaj.org/article/12f42ff9a1b94298b54abc7c01b14e5b
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