A Study on the Characteristic and Antibacterial Activity of Ti<sub>3</sub>O<sub>x</sub> Thin Films
A pure Ti target in Ar/O<sub>2</sub> gas mixture was used to synthesize Ti<sub>3</sub>O<sub>x</sub> thin film on a glass substrate by Reactive High-Power Impulse Magnetron Sputtering (HiPIMS) under different sputtering power (2 and 2.5 kW). The influence of HiPIMS...
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| Autores principales: | , , , , , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
MDPI AG
2021
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/12f42ff9a1b94298b54abc7c01b14e5b |
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