Glass Substrate Dust Removal Using 233 fs Laser-Generated Shockwave

Eliminating dust is gaining importance as a critical requirement in the display panel manufacturing process. The pixel resolution of display panels is increasing rapidly, which means that even small dust particles on the order of a few micrometers can affect them. Conventional surface cleaning metho...

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Autores principales:	Myeongjun Kim, Philgong Choi, Jae Heung Jo, Kyunghan Kim
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	LSC femtosecond laser shockwave particles cleaning Mechanical engineering and machinery TJ1-1570
Acceso en línea:	https://doaj.org/article/15d76bfbb4504deda472def56fecb5ad
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spelling	oai:doaj.org-article:15d76bfbb4504deda472def56fecb5ad2021-11-25T18:23:33ZGlass Substrate Dust Removal Using 233 fs Laser-Generated Shockwave10.3390/mi121113822072-666Xhttps://doaj.org/article/15d76bfbb4504deda472def56fecb5ad2021-11-01T00:00:00Zhttps://www.mdpi.com/2072-666X/12/11/1382https://doaj.org/toc/2072-666XEliminating dust is gaining importance as a critical requirement in the display panel manufacturing process. The pixel resolution of display panels is increasing rapidly, which means that even small dust particles on the order of a few micrometers can affect them. Conventional surface cleaning methods such as ultrasonic cleaning (USC), CO<sub>2</sub> cleaning, and wet cleaning may not be sufficiently efficient, economical, or environment friendly. In this study, a laser shockwave cleaning (LSC) method with a 233 fs pulsed laser was developed, which is different from the laser ablation cleaning method. To minimize thermal damage to the glass substrate, the effect of the number of pulses and the gap distance between the focused laser beam and the glass substrate were studied. The optimum number of pulses and gap distance to prevent damage to the glass substrate was inferred as 500 and 20 μm, respectively. With the optimal pulse number and gap distance, cleaning efficiency was tested at a 95% removal ratio regardless of the density of the particles. The effective cleaning area was measured using the removal ratio map and compared with the theoretical value.Myeongjun KimPhilgong ChoiJae Heung JoKyunghan KimMDPI AGarticleLSCfemtosecond lasershockwaveparticlescleaningMechanical engineering and machineryTJ1-1570ENMicromachines, Vol 12, Iss 1382, p 1382 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	LSC femtosecond laser shockwave particles cleaning Mechanical engineering and machinery TJ1-1570
spellingShingle	LSC femtosecond laser shockwave particles cleaning Mechanical engineering and machinery TJ1-1570 Myeongjun Kim Philgong Choi Jae Heung Jo Kyunghan Kim Glass Substrate Dust Removal Using 233 fs Laser-Generated Shockwave
description	Eliminating dust is gaining importance as a critical requirement in the display panel manufacturing process. The pixel resolution of display panels is increasing rapidly, which means that even small dust particles on the order of a few micrometers can affect them. Conventional surface cleaning methods such as ultrasonic cleaning (USC), CO<sub>2</sub> cleaning, and wet cleaning may not be sufficiently efficient, economical, or environment friendly. In this study, a laser shockwave cleaning (LSC) method with a 233 fs pulsed laser was developed, which is different from the laser ablation cleaning method. To minimize thermal damage to the glass substrate, the effect of the number of pulses and the gap distance between the focused laser beam and the glass substrate were studied. The optimum number of pulses and gap distance to prevent damage to the glass substrate was inferred as 500 and 20 μm, respectively. With the optimal pulse number and gap distance, cleaning efficiency was tested at a 95% removal ratio regardless of the density of the particles. The effective cleaning area was measured using the removal ratio map and compared with the theoretical value.
format	article
author	Myeongjun Kim Philgong Choi Jae Heung Jo Kyunghan Kim
author_facet	Myeongjun Kim Philgong Choi Jae Heung Jo Kyunghan Kim
author_sort	Myeongjun Kim
title	Glass Substrate Dust Removal Using 233 fs Laser-Generated Shockwave
title_short	Glass Substrate Dust Removal Using 233 fs Laser-Generated Shockwave
title_full	Glass Substrate Dust Removal Using 233 fs Laser-Generated Shockwave
title_fullStr	Glass Substrate Dust Removal Using 233 fs Laser-Generated Shockwave
title_full_unstemmed	Glass Substrate Dust Removal Using 233 fs Laser-Generated Shockwave
title_sort	glass substrate dust removal using 233 fs laser-generated shockwave
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/15d76bfbb4504deda472def56fecb5ad
work_keys_str_mv	AT myeongjunkim glasssubstratedustremovalusing233fslasergeneratedshockwave AT philgongchoi glasssubstratedustremovalusing233fslasergeneratedshockwave AT jaeheungjo glasssubstratedustremovalusing233fslasergeneratedshockwave AT kyunghankim glasssubstratedustremovalusing233fslasergeneratedshockwave
_version_	1718411180996820992

Glass Substrate Dust Removal Using 233 fs Laser-Generated Shockwave

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