IR sensitivity enhancement of CMOS Image Sensor with diffractive light trapping pixels

IR sensitivity enhancement of CMOS Image Sensor with diffractive light trapping pixels

Abstract We report on the IR sensitivity enhancement of back-illuminated CMOS Image Sensor (BI-CIS) with 2-dimensional diffractive inverted pyramid array structure (IPA) on crystalline silicon (c-Si) and deep trench isolation (DTI). FDTD simulations of semi-infinite thick c-Si having 2D IPAs on its...

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Bibliographic Details
Main Authors: Sozo Yokogawa, Itaru Oshiyama, Harumi Ikeda, Yoshiki Ebiko, Tomoyuki Hirano, Suguru Saito, Takashi Oinoue, Yoshiya Hagimoto, Hayato Iwamoto
Format: article
Language:EN
Published: Nature Portfolio 2017
Subjects:
Medicine
R
Science
Q
Online Access:https://doaj.org/article/16be2a0f87194729aa205b6c3d07b156
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https://doaj.org/article/16be2a0f87194729aa205b6c3d07b156

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