Near-field sub-diffraction photolithography with an elastomeric photomask
Photolithography is an established microfabrication technique but commonly uses costly shortwavelength light sources to achieve high resolution. Here the authors use metal patterns embedded in a flexible elastomer photomask with mechanical robustness for generation of subdiffraction patterns as a co...
Enregistré dans:
| Auteurs principaux: | , , , , , , , , , , , , , , , , , , , , , , , , |
|---|---|
| Format: | article |
| Langue: | EN |
| Publié: |
Nature Portfolio
2020
|
| Sujets: | |
| Accès en ligne: | https://doaj.org/article/1987c102c64a454185373731c0b8d245 |
| Tags: |
Ajouter un tag
Pas de tags, Soyez le premier à ajouter un tag!
|