Changes of Crystal Structure and Microstructure of MoN Coatings in Accordance with Inductively Coupled Plasma Power
Nano-crystalline MoN coatings were prepared by inductively coupled plasma magnetron sputtering (ICPMS) according to changing the plasma power from 0 to 200 W. The properties of the coatings were analyzed by X-ray diffraction, field emission scanning electron microscopy, atomic force microscopy, a na...
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| Format: | article |
| Language: | EN |
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MDPI AG
2021
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| Online Access: | https://doaj.org/article/19f9085a815246d8bcc90f02d45b5226 |
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