Nanofabrication for all-soft and high-density electronic devices based on liquid metal

Though all-soft electronic devices with liquid metals are attractive due to the material’s compatibility with patterning methods, obtaining sub-micron patterns remains a challenge. Here, the authors report a hybrid lithography process to realize all-soft submicron-scale devices based on EGaIn.

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Detalles Bibliográficos
Autores principales:	Min-gu Kim, Devin K. Brown, Oliver Brand
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2020
Materias:	Science Q
Acceso en línea:	https://doaj.org/article/1b66b2d62e4546fda824fa984e83f980
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spelling	oai:doaj.org-article:1b66b2d62e4546fda824fa984e83f9802021-12-02T16:50:00ZNanofabrication for all-soft and high-density electronic devices based on liquid metal10.1038/s41467-020-14814-y2041-1723https://doaj.org/article/1b66b2d62e4546fda824fa984e83f9802020-02-01T00:00:00Zhttps://doi.org/10.1038/s41467-020-14814-yhttps://doaj.org/toc/2041-1723Though all-soft electronic devices with liquid metals are attractive due to the material’s compatibility with patterning methods, obtaining sub-micron patterns remains a challenge. Here, the authors report a hybrid lithography process to realize all-soft submicron-scale devices based on EGaIn.Min-gu KimDevin K. BrownOliver BrandNature PortfolioarticleScienceQENNature Communications, Vol 11, Iss 1, Pp 1-11 (2020)
institution	DOAJ
collection	DOAJ
language	EN
topic	Science Q
spellingShingle	Science Q Min-gu Kim Devin K. Brown Oliver Brand Nanofabrication for all-soft and high-density electronic devices based on liquid metal
description	Though all-soft electronic devices with liquid metals are attractive due to the material’s compatibility with patterning methods, obtaining sub-micron patterns remains a challenge. Here, the authors report a hybrid lithography process to realize all-soft submicron-scale devices based on EGaIn.
format	article
author	Min-gu Kim Devin K. Brown Oliver Brand
author_facet	Min-gu Kim Devin K. Brown Oliver Brand
author_sort	Min-gu Kim
title	Nanofabrication for all-soft and high-density electronic devices based on liquid metal
title_short	Nanofabrication for all-soft and high-density electronic devices based on liquid metal
title_full	Nanofabrication for all-soft and high-density electronic devices based on liquid metal
title_fullStr	Nanofabrication for all-soft and high-density electronic devices based on liquid metal
title_full_unstemmed	Nanofabrication for all-soft and high-density electronic devices based on liquid metal
title_sort	nanofabrication for all-soft and high-density electronic devices based on liquid metal
publisher	Nature Portfolio
publishDate	2020
url	https://doaj.org/article/1b66b2d62e4546fda824fa984e83f980
work_keys_str_mv	AT mingukim nanofabricationforallsoftandhighdensityelectronicdevicesbasedonliquidmetal AT devinkbrown nanofabricationforallsoftandhighdensityelectronicdevicesbasedonliquidmetal AT oliverbrand nanofabricationforallsoftandhighdensityelectronicdevicesbasedonliquidmetal
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Nanofabrication for all-soft and high-density electronic devices based on liquid metal

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