Micromechanical Force Sensor Using the Stress–Impedance Effect of Soft Magnetic FeCuNbSiB
By using the stress–impedance (SI) effect of a soft magnetic amorphous FeCuNbSiB alloy, a micromachined force sensor was fabricated and characterized. The alloy was used as a sputtered thin film of 500 nm thickness. To clarify the SI effect in the used material as a thin film, its magnetic and mecha...
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| Auteurs principaux: | , , |
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| Format: | article |
| Langue: | EN |
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MDPI AG
2021
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| Accès en ligne: | https://doaj.org/article/1d4174b37ff24caf94b86b80fba44b95 |
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