Heterogeneous optoelectronic characteristics of Si micropillar arrays fabricated by metal-assisted chemical etching

Abstract Recent progress achieved in metal-assisted chemical etching (MACE) has enabled the production of high-quality micropillar arrays for various optoelectronic applications. Si micropillars produced by MACE often show a porous Si/SiO x shell on crystalline pillar cores introduced by local elect...

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Autores principales:	Yang Qian, David J. Magginetti, Seokmin Jeon, Yohan Yoon, Tony L. Olsen, Maoji Wang, Jordan M. Gerton, Heayoung P. Yoon
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2020
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/2114907b527a44e582b3d123598fc2fd
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spelling	oai:doaj.org-article:2114907b527a44e582b3d123598fc2fd2021-12-02T18:51:13ZHeterogeneous optoelectronic characteristics of Si micropillar arrays fabricated by metal-assisted chemical etching10.1038/s41598-020-73445-x2045-2322https://doaj.org/article/2114907b527a44e582b3d123598fc2fd2020-10-01T00:00:00Zhttps://doi.org/10.1038/s41598-020-73445-xhttps://doaj.org/toc/2045-2322Abstract Recent progress achieved in metal-assisted chemical etching (MACE) has enabled the production of high-quality micropillar arrays for various optoelectronic applications. Si micropillars produced by MACE often show a porous Si/SiO x shell on crystalline pillar cores introduced by local electrochemical reactions. In this paper, we report the distinct optoelectronic characteristics of the porous Si/SiO x shell correlated to their chemical compositions. Local photoluminescent (PL) images obtained with an immersion oil objective lens in confocal microscopy show a red emission peak (≈ 650 nm) along the perimeter of the pillars that is threefold stronger compared to their center. On the basis of our analysis, we find an unexpected PL increase (≈ 540 nm) at the oil/shell interface. We suggest that both PL enhancements are mainly attributed to the porous structures, a similar behavior observed in previous MACE studies. Surface potential maps simultaneously recorded with topography reveal a significantly high surface potential on the sidewalls of MACE-synthesized pillars (+ 0.5 V), which is restored to the level of planar Si control (− 0.5 V) after removing SiO x in hydrofluoric acid. These distinct optoelectronic characteristics of the Si/SiO x shell can be beneficial for various sensor architectures.Yang QianDavid J. MagginettiSeokmin JeonYohan YoonTony L. OlsenMaoji WangJordan M. GertonHeayoung P. YoonNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 10, Iss 1, Pp 1-10 (2020)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Yang Qian David J. Magginetti Seokmin Jeon Yohan Yoon Tony L. Olsen Maoji Wang Jordan M. Gerton Heayoung P. Yoon Heterogeneous optoelectronic characteristics of Si micropillar arrays fabricated by metal-assisted chemical etching
description	Abstract Recent progress achieved in metal-assisted chemical etching (MACE) has enabled the production of high-quality micropillar arrays for various optoelectronic applications. Si micropillars produced by MACE often show a porous Si/SiO x shell on crystalline pillar cores introduced by local electrochemical reactions. In this paper, we report the distinct optoelectronic characteristics of the porous Si/SiO x shell correlated to their chemical compositions. Local photoluminescent (PL) images obtained with an immersion oil objective lens in confocal microscopy show a red emission peak (≈ 650 nm) along the perimeter of the pillars that is threefold stronger compared to their center. On the basis of our analysis, we find an unexpected PL increase (≈ 540 nm) at the oil/shell interface. We suggest that both PL enhancements are mainly attributed to the porous structures, a similar behavior observed in previous MACE studies. Surface potential maps simultaneously recorded with topography reveal a significantly high surface potential on the sidewalls of MACE-synthesized pillars (+ 0.5 V), which is restored to the level of planar Si control (− 0.5 V) after removing SiO x in hydrofluoric acid. These distinct optoelectronic characteristics of the Si/SiO x shell can be beneficial for various sensor architectures.
format	article
author	Yang Qian David J. Magginetti Seokmin Jeon Yohan Yoon Tony L. Olsen Maoji Wang Jordan M. Gerton Heayoung P. Yoon
author_facet	Yang Qian David J. Magginetti Seokmin Jeon Yohan Yoon Tony L. Olsen Maoji Wang Jordan M. Gerton Heayoung P. Yoon
author_sort	Yang Qian
title	Heterogeneous optoelectronic characteristics of Si micropillar arrays fabricated by metal-assisted chemical etching
title_short	Heterogeneous optoelectronic characteristics of Si micropillar arrays fabricated by metal-assisted chemical etching
title_full	Heterogeneous optoelectronic characteristics of Si micropillar arrays fabricated by metal-assisted chemical etching
title_fullStr	Heterogeneous optoelectronic characteristics of Si micropillar arrays fabricated by metal-assisted chemical etching
title_full_unstemmed	Heterogeneous optoelectronic characteristics of Si micropillar arrays fabricated by metal-assisted chemical etching
title_sort	heterogeneous optoelectronic characteristics of si micropillar arrays fabricated by metal-assisted chemical etching
publisher	Nature Portfolio
publishDate	2020
url	https://doaj.org/article/2114907b527a44e582b3d123598fc2fd
work_keys_str_mv	AT yangqian heterogeneousoptoelectroniccharacteristicsofsimicropillararraysfabricatedbymetalassistedchemicaletching AT davidjmagginetti heterogeneousoptoelectroniccharacteristicsofsimicropillararraysfabricatedbymetalassistedchemicaletching AT seokminjeon heterogeneousoptoelectroniccharacteristicsofsimicropillararraysfabricatedbymetalassistedchemicaletching AT yohanyoon heterogeneousoptoelectroniccharacteristicsofsimicropillararraysfabricatedbymetalassistedchemicaletching AT tonylolsen heterogeneousoptoelectroniccharacteristicsofsimicropillararraysfabricatedbymetalassistedchemicaletching AT maojiwang heterogeneousoptoelectroniccharacteristicsofsimicropillararraysfabricatedbymetalassistedchemicaletching AT jordanmgerton heterogeneousoptoelectroniccharacteristicsofsimicropillararraysfabricatedbymetalassistedchemicaletching AT heayoungpyoon heterogeneousoptoelectroniccharacteristicsofsimicropillararraysfabricatedbymetalassistedchemicaletching
_version_	1718377433848086528

Heterogeneous optoelectronic characteristics of Si micropillar arrays fabricated by metal-assisted chemical etching

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