Heterogeneous optoelectronic characteristics of Si micropillar arrays fabricated by metal-assisted chemical etching
Abstract Recent progress achieved in metal-assisted chemical etching (MACE) has enabled the production of high-quality micropillar arrays for various optoelectronic applications. Si micropillars produced by MACE often show a porous Si/SiO x shell on crystalline pillar cores introduced by local elect...
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| Autores principales: | , , , , , , , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
Nature Portfolio
2020
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/2114907b527a44e582b3d123598fc2fd |
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