Tunable seesaw-like 3D capacitive sensor for force and acceleration sensing

Abstract To address the resource-competing issue between high sensitivity and wide working range for a stand-alone sensor, development of capacitive sensors with an adjustable gap between two electrodes has been of growing interest. While several approaches have been developed to fabricate tunable c...

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Autores principales:	Jilong Ye, Fan Zhang, Zhangming Shen, Shunze Cao, Tianqi Jin, Xiaogang Guo, Zhihong Li, Li Lin, Yihui Zhang
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2021
Materias:	Electronics TK7800-8360 Materials of engineering and construction. Mechanics of materials TA401-492
Acceso en línea:	https://doaj.org/article/215af5ec69ec4b43bc0894563abb2a13
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spelling	oai:doaj.org-article:215af5ec69ec4b43bc0894563abb2a132021-12-02T18:01:53ZTunable seesaw-like 3D capacitive sensor for force and acceleration sensing10.1038/s41528-021-00125-92397-4621https://doaj.org/article/215af5ec69ec4b43bc0894563abb2a132021-10-01T00:00:00Zhttps://doi.org/10.1038/s41528-021-00125-9https://doaj.org/toc/2397-4621Abstract To address the resource-competing issue between high sensitivity and wide working range for a stand-alone sensor, development of capacitive sensors with an adjustable gap between two electrodes has been of growing interest. While several approaches have been developed to fabricate tunable capacitive sensors, it remains challenging to achieve, simultaneously, a broad range of tunable sensitivity and working range in a single device. In this work, a 3D capacitive sensor with a seesaw-like shape is designed and fabricated by the controlled compressive buckling assembly, which leverages the mechanically tunable configuration to achieve high-precision force sensing (resolution ~5.22 nN) and unprecedented adjustment range (by ~33 times) of sensitivity. The mechanical tests under different loading conditions demonstrate the stability and reliability of capacitive sensors. Incorporation of an asymmetric seesaw-like structure design in the capacitive sensor allows the acceleration measurement with a tunable sensitivity. These results suggest simple and low-cost routes to high-performance, tunable 3D capacitive sensors, with diverse potential applications in wearable electronics and biomedical devices.Jilong YeFan ZhangZhangming ShenShunze CaoTianqi JinXiaogang GuoZhihong LiLi LinYihui ZhangNature PortfolioarticleElectronicsTK7800-8360Materials of engineering and construction. Mechanics of materialsTA401-492ENnpj Flexible Electronics, Vol 5, Iss 1, Pp 1-9 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Electronics TK7800-8360 Materials of engineering and construction. Mechanics of materials TA401-492
spellingShingle	Electronics TK7800-8360 Materials of engineering and construction. Mechanics of materials TA401-492 Jilong Ye Fan Zhang Zhangming Shen Shunze Cao Tianqi Jin Xiaogang Guo Zhihong Li Li Lin Yihui Zhang Tunable seesaw-like 3D capacitive sensor for force and acceleration sensing
description	Abstract To address the resource-competing issue between high sensitivity and wide working range for a stand-alone sensor, development of capacitive sensors with an adjustable gap between two electrodes has been of growing interest. While several approaches have been developed to fabricate tunable capacitive sensors, it remains challenging to achieve, simultaneously, a broad range of tunable sensitivity and working range in a single device. In this work, a 3D capacitive sensor with a seesaw-like shape is designed and fabricated by the controlled compressive buckling assembly, which leverages the mechanically tunable configuration to achieve high-precision force sensing (resolution ~5.22 nN) and unprecedented adjustment range (by ~33 times) of sensitivity. The mechanical tests under different loading conditions demonstrate the stability and reliability of capacitive sensors. Incorporation of an asymmetric seesaw-like structure design in the capacitive sensor allows the acceleration measurement with a tunable sensitivity. These results suggest simple and low-cost routes to high-performance, tunable 3D capacitive sensors, with diverse potential applications in wearable electronics and biomedical devices.
format	article
author	Jilong Ye Fan Zhang Zhangming Shen Shunze Cao Tianqi Jin Xiaogang Guo Zhihong Li Li Lin Yihui Zhang
author_facet	Jilong Ye Fan Zhang Zhangming Shen Shunze Cao Tianqi Jin Xiaogang Guo Zhihong Li Li Lin Yihui Zhang
author_sort	Jilong Ye
title	Tunable seesaw-like 3D capacitive sensor for force and acceleration sensing
title_short	Tunable seesaw-like 3D capacitive sensor for force and acceleration sensing
title_full	Tunable seesaw-like 3D capacitive sensor for force and acceleration sensing
title_fullStr	Tunable seesaw-like 3D capacitive sensor for force and acceleration sensing
title_full_unstemmed	Tunable seesaw-like 3D capacitive sensor for force and acceleration sensing
title_sort	tunable seesaw-like 3d capacitive sensor for force and acceleration sensing
publisher	Nature Portfolio
publishDate	2021
url	https://doaj.org/article/215af5ec69ec4b43bc0894563abb2a13
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Tunable seesaw-like 3D capacitive sensor for force and acceleration sensing

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