Fully transparent high performance thin film transistors with bilayer ITO/Al-Sn-Zn-O channel structures fabricated on glass substrate
Abstract In this work, fully transparent high performance double-channel indium-tin-oxide/Al–Sn–Zn–O thin-film transistors (ITO/ATZO TFTs) are successfully fabricated on glass by radio frequency (RF) magnetron sputtering. The ITO layer acts as the bottom channel layer to increase the channel carrier...
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2017
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oai:doaj.org-article:21ba9d2dccb940cdbc9ab7c0bc98475c2021-12-02T11:41:00ZFully transparent high performance thin film transistors with bilayer ITO/Al-Sn-Zn-O channel structures fabricated on glass substrate10.1038/s41598-017-01691-72045-2322https://doaj.org/article/21ba9d2dccb940cdbc9ab7c0bc98475c2017-05-01T00:00:00Zhttps://doi.org/10.1038/s41598-017-01691-7https://doaj.org/toc/2045-2322Abstract In this work, fully transparent high performance double-channel indium-tin-oxide/Al–Sn–Zn–O thin-film transistors (ITO/ATZO TFTs) are successfully fabricated on glass by radio frequency (RF) magnetron sputtering. The ITO layer acts as the bottom channel layer to increase the channel carrier concentration. The top ATZO channel layer, which is deposited via high oxygen partial pressure in the sputtering process, is useful to control the minimum off-state current. After annealing, the ITO/ATZO TFT demonstrates outstanding electrical performances, including a high ON/OFF current ratio (Ion/Ioff) of 3.5 × 108, a steep threshold swing (SS) of 142.2 mV/decade, a superior saturation mobility (μsat) of 246.0 cm2/Vs, and a threshold voltage VT of 0.5 V. The operation mechanisms for double-channel structures are also clarified.Yingying CongDedong HanJunchen DongShengdong ZhangXing ZhangYi WangNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 7, Iss 1, Pp 1-6 (2017) |
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Medicine R Science Q Yingying Cong Dedong Han Junchen Dong Shengdong Zhang Xing Zhang Yi Wang Fully transparent high performance thin film transistors with bilayer ITO/Al-Sn-Zn-O channel structures fabricated on glass substrate |
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Abstract In this work, fully transparent high performance double-channel indium-tin-oxide/Al–Sn–Zn–O thin-film transistors (ITO/ATZO TFTs) are successfully fabricated on glass by radio frequency (RF) magnetron sputtering. The ITO layer acts as the bottom channel layer to increase the channel carrier concentration. The top ATZO channel layer, which is deposited via high oxygen partial pressure in the sputtering process, is useful to control the minimum off-state current. After annealing, the ITO/ATZO TFT demonstrates outstanding electrical performances, including a high ON/OFF current ratio (Ion/Ioff) of 3.5 × 108, a steep threshold swing (SS) of 142.2 mV/decade, a superior saturation mobility (μsat) of 246.0 cm2/Vs, and a threshold voltage VT of 0.5 V. The operation mechanisms for double-channel structures are also clarified. |
format |
article |
author |
Yingying Cong Dedong Han Junchen Dong Shengdong Zhang Xing Zhang Yi Wang |
author_facet |
Yingying Cong Dedong Han Junchen Dong Shengdong Zhang Xing Zhang Yi Wang |
author_sort |
Yingying Cong |
title |
Fully transparent high performance thin film transistors with bilayer ITO/Al-Sn-Zn-O channel structures fabricated on glass substrate |
title_short |
Fully transparent high performance thin film transistors with bilayer ITO/Al-Sn-Zn-O channel structures fabricated on glass substrate |
title_full |
Fully transparent high performance thin film transistors with bilayer ITO/Al-Sn-Zn-O channel structures fabricated on glass substrate |
title_fullStr |
Fully transparent high performance thin film transistors with bilayer ITO/Al-Sn-Zn-O channel structures fabricated on glass substrate |
title_full_unstemmed |
Fully transparent high performance thin film transistors with bilayer ITO/Al-Sn-Zn-O channel structures fabricated on glass substrate |
title_sort |
fully transparent high performance thin film transistors with bilayer ito/al-sn-zn-o channel structures fabricated on glass substrate |
publisher |
Nature Portfolio |
publishDate |
2017 |
url |
https://doaj.org/article/21ba9d2dccb940cdbc9ab7c0bc98475c |
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