Impact of defects on the structural and electrical transport properties of Sb2Te3 thin films by SHI irradiation
Implantation of defects is an attractive trend for the modification of important properties of thin films for practical applications. In the present attempt, an effective approach for tuning the native defects in thin films is reported. The films were sequentially irradiated at five different fluenc...
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| Main Authors: | , , , , , , , |
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| Format: | article |
| Language: | EN |
| Published: |
Elsevier
2021
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| Subjects: | |
| Online Access: | https://doaj.org/article/224cbe9d39ed455cb1efafbd1f18f221 |
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