Non-classical nucleation in vapor–liquid–solid growth of monolayer WS2 revealed by in-situ monitoring chemical vapor deposition

Abstract The very early nucleation stage of a transition metal dichalcogenide (TMD) was directly observed with in-situ monitoring of chemical vapor deposition and automated image analysis. Unique nucleation dynamics, such as very large critical nuclei and slow to rapid growth transitions, were obser...

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Autores principales: Xiaoming Qiang, Yuta Iwamoto, Aoi Watanabe, Tomoya Kameyama, Xing He, Toshiro Kaneko, Yasushi Shibuta, Toshiaki Kato
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Publicado: Nature Portfolio 2021
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Acceso en línea:https://doaj.org/article/25143999cc7541a18fab0dd25b368154
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spelling oai:doaj.org-article:25143999cc7541a18fab0dd25b3681542021-11-21T12:20:19ZNon-classical nucleation in vapor–liquid–solid growth of monolayer WS2 revealed by in-situ monitoring chemical vapor deposition10.1038/s41598-021-01666-92045-2322https://doaj.org/article/25143999cc7541a18fab0dd25b3681542021-11-01T00:00:00Zhttps://doi.org/10.1038/s41598-021-01666-9https://doaj.org/toc/2045-2322Abstract The very early nucleation stage of a transition metal dichalcogenide (TMD) was directly observed with in-situ monitoring of chemical vapor deposition and automated image analysis. Unique nucleation dynamics, such as very large critical nuclei and slow to rapid growth transitions, were observed during the vapor–liquid–solid (VLS) growth of monolayer tungsten disulfide (WS2). This can be explained by two-step nucleation, also known as non-classical nucleation, in which metastable clusters are formed through the aggregation of droplets. Subsequently, nucleation of solid WS2 takes place inside the metastable cluster. Furthermore, the detailed nucleation dynamics was systematically investigated from a thermodynamic point of view, revealing that the incubation time of metastable cluster formation follows the traditional time–temperature transformation diagram. Quantitative phase field simulation, combined with Bayesian inference, was conducted to extract quantitative information on the growth dynamics and crystal anisotropy from in-situ images. A clear transition in growth dynamics and crystal anisotropy between the slow and rapid growth phases was quantitatively verified. This observation supports the existence of two-step nucleation in the VLS growth of WS2. Such detailed understanding of TMD nucleation dynamics can be useful for achieving perfect structure control of TMDs.Xiaoming QiangYuta IwamotoAoi WatanabeTomoya KameyamaXing HeToshiro KanekoYasushi ShibutaToshiaki KatoNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 11, Iss 1, Pp 1-9 (2021)
institution DOAJ
collection DOAJ
language EN
topic Medicine
R
Science
Q
spellingShingle Medicine
R
Science
Q
Xiaoming Qiang
Yuta Iwamoto
Aoi Watanabe
Tomoya Kameyama
Xing He
Toshiro Kaneko
Yasushi Shibuta
Toshiaki Kato
Non-classical nucleation in vapor–liquid–solid growth of monolayer WS2 revealed by in-situ monitoring chemical vapor deposition
description Abstract The very early nucleation stage of a transition metal dichalcogenide (TMD) was directly observed with in-situ monitoring of chemical vapor deposition and automated image analysis. Unique nucleation dynamics, such as very large critical nuclei and slow to rapid growth transitions, were observed during the vapor–liquid–solid (VLS) growth of monolayer tungsten disulfide (WS2). This can be explained by two-step nucleation, also known as non-classical nucleation, in which metastable clusters are formed through the aggregation of droplets. Subsequently, nucleation of solid WS2 takes place inside the metastable cluster. Furthermore, the detailed nucleation dynamics was systematically investigated from a thermodynamic point of view, revealing that the incubation time of metastable cluster formation follows the traditional time–temperature transformation diagram. Quantitative phase field simulation, combined with Bayesian inference, was conducted to extract quantitative information on the growth dynamics and crystal anisotropy from in-situ images. A clear transition in growth dynamics and crystal anisotropy between the slow and rapid growth phases was quantitatively verified. This observation supports the existence of two-step nucleation in the VLS growth of WS2. Such detailed understanding of TMD nucleation dynamics can be useful for achieving perfect structure control of TMDs.
format article
author Xiaoming Qiang
Yuta Iwamoto
Aoi Watanabe
Tomoya Kameyama
Xing He
Toshiro Kaneko
Yasushi Shibuta
Toshiaki Kato
author_facet Xiaoming Qiang
Yuta Iwamoto
Aoi Watanabe
Tomoya Kameyama
Xing He
Toshiro Kaneko
Yasushi Shibuta
Toshiaki Kato
author_sort Xiaoming Qiang
title Non-classical nucleation in vapor–liquid–solid growth of monolayer WS2 revealed by in-situ monitoring chemical vapor deposition
title_short Non-classical nucleation in vapor–liquid–solid growth of monolayer WS2 revealed by in-situ monitoring chemical vapor deposition
title_full Non-classical nucleation in vapor–liquid–solid growth of monolayer WS2 revealed by in-situ monitoring chemical vapor deposition
title_fullStr Non-classical nucleation in vapor–liquid–solid growth of monolayer WS2 revealed by in-situ monitoring chemical vapor deposition
title_full_unstemmed Non-classical nucleation in vapor–liquid–solid growth of monolayer WS2 revealed by in-situ monitoring chemical vapor deposition
title_sort non-classical nucleation in vapor–liquid–solid growth of monolayer ws2 revealed by in-situ monitoring chemical vapor deposition
publisher Nature Portfolio
publishDate 2021
url https://doaj.org/article/25143999cc7541a18fab0dd25b368154
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AT xinghe nonclassicalnucleationinvaporliquidsolidgrowthofmonolayerws2revealedbyinsitumonitoringchemicalvapordeposition
AT toshirokaneko nonclassicalnucleationinvaporliquidsolidgrowthofmonolayerws2revealedbyinsitumonitoringchemicalvapordeposition
AT yasushishibuta nonclassicalnucleationinvaporliquidsolidgrowthofmonolayerws2revealedbyinsitumonitoringchemicalvapordeposition
AT toshiakikato nonclassicalnucleationinvaporliquidsolidgrowthofmonolayerws2revealedbyinsitumonitoringchemicalvapordeposition
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