Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators

Micro- and nanomechanical resonators play a crucial role in sensing applications. Here, the authors demonstrate electrically tunable modal coupling in capacitive microelectromechanical gyroscopic ring resonators that allows for improving the performance micro/nano-sensors relying on precise control...

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Autores principales:	Xin Zhou, Chun Zhao, Dingbang Xiao, Jiangkun Sun, Guillermo Sobreviela, Dustin D. Gerrard, Yunhan Chen, Ian Flader, Thomas W. Kenny, Xuezhong Wu, Ashwin A. Seshia
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2019
Materias:	Science Q
Acceso en línea:	https://doaj.org/article/2632052d800a4ae18f84ec4601f20bbe
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spelling	oai:doaj.org-article:2632052d800a4ae18f84ec4601f20bbe2021-12-02T15:35:05ZDynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators10.1038/s41467-019-12796-02041-1723https://doaj.org/article/2632052d800a4ae18f84ec4601f20bbe2019-10-01T00:00:00Zhttps://doi.org/10.1038/s41467-019-12796-0https://doaj.org/toc/2041-1723Micro- and nanomechanical resonators play a crucial role in sensing applications. Here, the authors demonstrate electrically tunable modal coupling in capacitive microelectromechanical gyroscopic ring resonators that allows for improving the performance micro/nano-sensors relying on precise control of the degree of modal coupling.Xin ZhouChun ZhaoDingbang XiaoJiangkun SunGuillermo SobrevielaDustin D. GerrardYunhan ChenIan FladerThomas W. KennyXuezhong WuAshwin A. SeshiaNature PortfolioarticleScienceQENNature Communications, Vol 10, Iss 1, Pp 1-9 (2019)
institution	DOAJ
collection	DOAJ
language	EN
topic	Science Q
spellingShingle	Science Q Xin Zhou Chun Zhao Dingbang Xiao Jiangkun Sun Guillermo Sobreviela Dustin D. Gerrard Yunhan Chen Ian Flader Thomas W. Kenny Xuezhong Wu Ashwin A. Seshia Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators
description	Micro- and nanomechanical resonators play a crucial role in sensing applications. Here, the authors demonstrate electrically tunable modal coupling in capacitive microelectromechanical gyroscopic ring resonators that allows for improving the performance micro/nano-sensors relying on precise control of the degree of modal coupling.
format	article
author	Xin Zhou Chun Zhao Dingbang Xiao Jiangkun Sun Guillermo Sobreviela Dustin D. Gerrard Yunhan Chen Ian Flader Thomas W. Kenny Xuezhong Wu Ashwin A. Seshia
author_facet	Xin Zhou Chun Zhao Dingbang Xiao Jiangkun Sun Guillermo Sobreviela Dustin D. Gerrard Yunhan Chen Ian Flader Thomas W. Kenny Xuezhong Wu Ashwin A. Seshia
author_sort	Xin Zhou
title	Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators
title_short	Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators
title_full	Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators
title_fullStr	Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators
title_full_unstemmed	Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators
title_sort	dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators
publisher	Nature Portfolio
publishDate	2019
url	https://doaj.org/article/2632052d800a4ae18f84ec4601f20bbe
work_keys_str_mv	AT xinzhou dynamicmodulationofmodalcouplinginmicroelectromechanicalgyroscopicringresonators AT chunzhao dynamicmodulationofmodalcouplinginmicroelectromechanicalgyroscopicringresonators AT dingbangxiao dynamicmodulationofmodalcouplinginmicroelectromechanicalgyroscopicringresonators AT jiangkunsun dynamicmodulationofmodalcouplinginmicroelectromechanicalgyroscopicringresonators AT guillermosobreviela dynamicmodulationofmodalcouplinginmicroelectromechanicalgyroscopicringresonators AT dustindgerrard dynamicmodulationofmodalcouplinginmicroelectromechanicalgyroscopicringresonators AT yunhanchen dynamicmodulationofmodalcouplinginmicroelectromechanicalgyroscopicringresonators AT ianflader dynamicmodulationofmodalcouplinginmicroelectromechanicalgyroscopicringresonators AT thomaswkenny dynamicmodulationofmodalcouplinginmicroelectromechanicalgyroscopicringresonators AT xuezhongwu dynamicmodulationofmodalcouplinginmicroelectromechanicalgyroscopicringresonators AT ashwinaseshia dynamicmodulationofmodalcouplinginmicroelectromechanicalgyroscopicringresonators
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Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators

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