Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators
Micro- and nanomechanical resonators play a crucial role in sensing applications. Here, the authors demonstrate electrically tunable modal coupling in capacitive microelectromechanical gyroscopic ring resonators that allows for improving the performance micro/nano-sensors relying on precise control...
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| Main Authors: | , , , , , , , , , , |
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| Format: | article |
| Language: | EN |
| Published: |
Nature Portfolio
2019
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| Subjects: | |
| Online Access: | https://doaj.org/article/2632052d800a4ae18f84ec4601f20bbe |
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