Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators

Micro- and nanomechanical resonators play a crucial role in sensing applications. Here, the authors demonstrate electrically tunable modal coupling in capacitive microelectromechanical gyroscopic ring resonators that allows for improving the performance micro/nano-sensors relying on precise control...

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Autores principales: Xin Zhou, Chun Zhao, Dingbang Xiao, Jiangkun Sun, Guillermo Sobreviela, Dustin D. Gerrard, Yunhan Chen, Ian Flader, Thomas W. Kenny, Xuezhong Wu, Ashwin A. Seshia
Formato: article
Lenguaje:EN
Publicado: Nature Portfolio 2019
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Acceso en línea:https://doaj.org/article/2632052d800a4ae18f84ec4601f20bbe
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