Suspended Silicon Waveguide with Sub-Wavelength Grating Cladding for Optical MEMS in Mid-Infrared

Mid-infrared (MIR) photonics are generating considerable interest because of the potential applications in spectroscopic sensing, thermal imaging, and remote sensing. Silicon photonics is believed to be a promising solution to realize MIR photonic integrated circuits (PICs). The past decade has seen...

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Autores principales:	Qifeng Qiao, Haoyang Sun, Xinmiao Liu, Bowei Dong, Ji Xia, Chengkuo Lee, Guangya Zhou
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	silicon photonics MIR photonics optical MEMS photonic integrated circuit reconfigurable photonics Mechanical engineering and machinery TJ1-1570
Acceso en línea:	https://doaj.org/article/264bdf79b04b4cf7b05bf32e0b13eae6
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id	oai:doaj.org-article:264bdf79b04b4cf7b05bf32e0b13eae6
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spelling	oai:doaj.org-article:264bdf79b04b4cf7b05bf32e0b13eae62021-11-25T18:23:01ZSuspended Silicon Waveguide with Sub-Wavelength Grating Cladding for Optical MEMS in Mid-Infrared10.3390/mi121113112072-666Xhttps://doaj.org/article/264bdf79b04b4cf7b05bf32e0b13eae62021-10-01T00:00:00Zhttps://www.mdpi.com/2072-666X/12/11/1311https://doaj.org/toc/2072-666XMid-infrared (MIR) photonics are generating considerable interest because of the potential applications in spectroscopic sensing, thermal imaging, and remote sensing. Silicon photonics is believed to be a promising solution to realize MIR photonic integrated circuits (PICs). The past decade has seen a huge growth in MIR PIC building blocks. However, there is still a need for the development of MIR reconfigurable photonics to enable powerful on-chip optical systems and new functionalities. In this paper, we present an MIR (3.7~4.1 μm wavelength range) MEMS reconfiguration approach using the suspended silicon waveguide platform on the silicon-on-insulator. With the sub-wavelength grating claddings, the photonic waveguide can be well integrated with the MEMS actuator, thus offering low-loss, energy-efficient, and effective reconfiguration. We present a simulation study on the waveguide design and depict the MEMS-integration approach. Moreover, we experimentally report the suspended waveguide with propagation loss (−2.9 dB/cm) and bending loss (−0.076 dB each). The suspended waveguide coupler is experimentally investigated. In addition, we validate the proposed optical MEMS approach using a reconfigurable ring resonator design. In conclusion, we experimentally demonstrate the proposed waveguide platform’s capability for MIR MEMS-reconfigurable photonics, which empowers the MIR on-chip optical systems for various applications.Qifeng QiaoHaoyang SunXinmiao LiuBowei DongJi XiaChengkuo LeeGuangya ZhouMDPI AGarticlesilicon photonicsMIR photonicsoptical MEMSphotonic integrated circuitreconfigurable photonicsMechanical engineering and machineryTJ1-1570ENMicromachines, Vol 12, Iss 1311, p 1311 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	silicon photonics MIR photonics optical MEMS photonic integrated circuit reconfigurable photonics Mechanical engineering and machinery TJ1-1570
spellingShingle	silicon photonics MIR photonics optical MEMS photonic integrated circuit reconfigurable photonics Mechanical engineering and machinery TJ1-1570 Qifeng Qiao Haoyang Sun Xinmiao Liu Bowei Dong Ji Xia Chengkuo Lee Guangya Zhou Suspended Silicon Waveguide with Sub-Wavelength Grating Cladding for Optical MEMS in Mid-Infrared
description	Mid-infrared (MIR) photonics are generating considerable interest because of the potential applications in spectroscopic sensing, thermal imaging, and remote sensing. Silicon photonics is believed to be a promising solution to realize MIR photonic integrated circuits (PICs). The past decade has seen a huge growth in MIR PIC building blocks. However, there is still a need for the development of MIR reconfigurable photonics to enable powerful on-chip optical systems and new functionalities. In this paper, we present an MIR (3.7~4.1 μm wavelength range) MEMS reconfiguration approach using the suspended silicon waveguide platform on the silicon-on-insulator. With the sub-wavelength grating claddings, the photonic waveguide can be well integrated with the MEMS actuator, thus offering low-loss, energy-efficient, and effective reconfiguration. We present a simulation study on the waveguide design and depict the MEMS-integration approach. Moreover, we experimentally report the suspended waveguide with propagation loss (−2.9 dB/cm) and bending loss (−0.076 dB each). The suspended waveguide coupler is experimentally investigated. In addition, we validate the proposed optical MEMS approach using a reconfigurable ring resonator design. In conclusion, we experimentally demonstrate the proposed waveguide platform’s capability for MIR MEMS-reconfigurable photonics, which empowers the MIR on-chip optical systems for various applications.
format	article
author	Qifeng Qiao Haoyang Sun Xinmiao Liu Bowei Dong Ji Xia Chengkuo Lee Guangya Zhou
author_facet	Qifeng Qiao Haoyang Sun Xinmiao Liu Bowei Dong Ji Xia Chengkuo Lee Guangya Zhou
author_sort	Qifeng Qiao
title	Suspended Silicon Waveguide with Sub-Wavelength Grating Cladding for Optical MEMS in Mid-Infrared
title_short	Suspended Silicon Waveguide with Sub-Wavelength Grating Cladding for Optical MEMS in Mid-Infrared
title_full	Suspended Silicon Waveguide with Sub-Wavelength Grating Cladding for Optical MEMS in Mid-Infrared
title_fullStr	Suspended Silicon Waveguide with Sub-Wavelength Grating Cladding for Optical MEMS in Mid-Infrared
title_full_unstemmed	Suspended Silicon Waveguide with Sub-Wavelength Grating Cladding for Optical MEMS in Mid-Infrared
title_sort	suspended silicon waveguide with sub-wavelength grating cladding for optical mems in mid-infrared
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/264bdf79b04b4cf7b05bf32e0b13eae6
work_keys_str_mv	AT qifengqiao suspendedsiliconwaveguidewithsubwavelengthgratingcladdingforopticalmemsinmidinfrared AT haoyangsun suspendedsiliconwaveguidewithsubwavelengthgratingcladdingforopticalmemsinmidinfrared AT xinmiaoliu suspendedsiliconwaveguidewithsubwavelengthgratingcladdingforopticalmemsinmidinfrared AT boweidong suspendedsiliconwaveguidewithsubwavelengthgratingcladdingforopticalmemsinmidinfrared AT jixia suspendedsiliconwaveguidewithsubwavelengthgratingcladdingforopticalmemsinmidinfrared AT chengkuolee suspendedsiliconwaveguidewithsubwavelengthgratingcladdingforopticalmemsinmidinfrared AT guangyazhou suspendedsiliconwaveguidewithsubwavelengthgratingcladdingforopticalmemsinmidinfrared
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Suspended Silicon Waveguide with Sub-Wavelength Grating Cladding for Optical MEMS in Mid-Infrared

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