Fabrication of full-color GaN-based light-emitting diodes on nearly lattice-matched flexible metal foils
Abstract GaN-based light-emitting diodes (LEDs) have been widely accepted as highly efficient solid-state light sources capable of replacing conventional incandescent and fluorescent lamps. However, their applications are limited to small devices because their fabrication process is expensive as it...
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2017
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oai:doaj.org-article:267aaead976f4c12aadc73da38b1db372021-12-02T15:05:41ZFabrication of full-color GaN-based light-emitting diodes on nearly lattice-matched flexible metal foils10.1038/s41598-017-02431-72045-2322https://doaj.org/article/267aaead976f4c12aadc73da38b1db372017-05-01T00:00:00Zhttps://doi.org/10.1038/s41598-017-02431-7https://doaj.org/toc/2045-2322Abstract GaN-based light-emitting diodes (LEDs) have been widely accepted as highly efficient solid-state light sources capable of replacing conventional incandescent and fluorescent lamps. However, their applications are limited to small devices because their fabrication process is expensive as it involves epitaxial growth of GaN by metal-organic chemical vapor deposition (MOCVD) on single crystalline sapphire wafers. If a low-cost epitaxial growth process such as sputtering on a metal foil can be used, it will be possible to fabricate large-area and flexible GaN-based light-emitting displays. Here we report preparation of GaN films on nearly lattice-matched flexible Hf foils using pulsed sputtering deposition (PSD) and demonstrate feasibility of fabricating full-color GaN-based LEDs. It was found that introduction of low-temperature (LT) grown layers suppressed the interfacial reaction between GaN and Hf, allowing the growth of high-quality GaN films on Hf foils. We fabricated blue, green, and red LEDs on Hf foils and confirmed their normal operation. The present results indicate that GaN films on Hf foils have potential applications in fabrication of future large-area flexible GaN-based optoelectronics.Hyeryun KimJitsuo OhtaKohei UenoAtsushi KobayashiMari MoritaYuki TokumotoHiroshi FujiokaNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 7, Iss 1, Pp 1-5 (2017) |
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Medicine R Science Q Hyeryun Kim Jitsuo Ohta Kohei Ueno Atsushi Kobayashi Mari Morita Yuki Tokumoto Hiroshi Fujioka Fabrication of full-color GaN-based light-emitting diodes on nearly lattice-matched flexible metal foils |
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Abstract GaN-based light-emitting diodes (LEDs) have been widely accepted as highly efficient solid-state light sources capable of replacing conventional incandescent and fluorescent lamps. However, their applications are limited to small devices because their fabrication process is expensive as it involves epitaxial growth of GaN by metal-organic chemical vapor deposition (MOCVD) on single crystalline sapphire wafers. If a low-cost epitaxial growth process such as sputtering on a metal foil can be used, it will be possible to fabricate large-area and flexible GaN-based light-emitting displays. Here we report preparation of GaN films on nearly lattice-matched flexible Hf foils using pulsed sputtering deposition (PSD) and demonstrate feasibility of fabricating full-color GaN-based LEDs. It was found that introduction of low-temperature (LT) grown layers suppressed the interfacial reaction between GaN and Hf, allowing the growth of high-quality GaN films on Hf foils. We fabricated blue, green, and red LEDs on Hf foils and confirmed their normal operation. The present results indicate that GaN films on Hf foils have potential applications in fabrication of future large-area flexible GaN-based optoelectronics. |
format |
article |
author |
Hyeryun Kim Jitsuo Ohta Kohei Ueno Atsushi Kobayashi Mari Morita Yuki Tokumoto Hiroshi Fujioka |
author_facet |
Hyeryun Kim Jitsuo Ohta Kohei Ueno Atsushi Kobayashi Mari Morita Yuki Tokumoto Hiroshi Fujioka |
author_sort |
Hyeryun Kim |
title |
Fabrication of full-color GaN-based light-emitting diodes on nearly lattice-matched flexible metal foils |
title_short |
Fabrication of full-color GaN-based light-emitting diodes on nearly lattice-matched flexible metal foils |
title_full |
Fabrication of full-color GaN-based light-emitting diodes on nearly lattice-matched flexible metal foils |
title_fullStr |
Fabrication of full-color GaN-based light-emitting diodes on nearly lattice-matched flexible metal foils |
title_full_unstemmed |
Fabrication of full-color GaN-based light-emitting diodes on nearly lattice-matched flexible metal foils |
title_sort |
fabrication of full-color gan-based light-emitting diodes on nearly lattice-matched flexible metal foils |
publisher |
Nature Portfolio |
publishDate |
2017 |
url |
https://doaj.org/article/267aaead976f4c12aadc73da38b1db37 |
work_keys_str_mv |
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1718388754355322880 |