Modulating Optical Characteristics of Nanoimprinted Plasmonic Device by Re-Shaping Process of Polymer Mold

Metal nanostructures exhibit specific optical characteristics owing to their localized surface plasmon resonance (LSPR) and have been studied for applications in various optical devices. The LSPR property strongly depends on the size and shape of metal nanostructures; thus, plasmonic devices must be...

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Autores principales:	Hirotaka Yamada, Kenji Sueyoshi, Hideaki Hisamoto, Tatsuro Endo
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	plasmonics nanoimprint plasmonic device plasmonic sensor Mechanical engineering and machinery TJ1-1570
Acceso en línea:	https://doaj.org/article/30253d836c6c4f908b56e3d1db6e222d
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spelling	oai:doaj.org-article:30253d836c6c4f908b56e3d1db6e222d2021-11-25T18:23:07ZModulating Optical Characteristics of Nanoimprinted Plasmonic Device by Re-Shaping Process of Polymer Mold10.3390/mi121113232072-666Xhttps://doaj.org/article/30253d836c6c4f908b56e3d1db6e222d2021-10-01T00:00:00Zhttps://www.mdpi.com/2072-666X/12/11/1323https://doaj.org/toc/2072-666XMetal nanostructures exhibit specific optical characteristics owing to their localized surface plasmon resonance (LSPR) and have been studied for applications in various optical devices. The LSPR property strongly depends on the size and shape of metal nanostructures; thus, plasmonic devices must be designed and fabricated according to their uses. Nanoimprint lithography (NIL) is an effective process for repeatedly fabricating metal nanostructures with controlled sizes and shapes and require optical properties. NIL is a powerful method for mass-producible, low-cost, and large-area fabrication. However, the process lacks flexibility in adjusting the size and shape according to the desirable optical characteristics because the size and shape of metal nanostructures are determined by a single corresponding mold. Here, we conducted a re-shaping process through the air-plasma etching of a polymer’s secondary mold (two-dimensional nanopillar array made of cyclo-olefin polymer (COP)) to modulate the sizes and shapes of nanopillars; then, we controlled the spectral characteristics of the imprinted plasmonic devices. The relationship between the structural change of the mold, which was based on etching time, and the optical characteristics of the corresponding plasmonic device was evaluated through experiments and simulations. According to evaluation results, the diameter of the nanopillar was controlled from 248 to 139 nm due to the etching time and formation of a pit structure. Consequently, the spectral properties changed, and responsivity to the surrounding dielectric environment was improved. Therefore, plasmonic devices based on the re-shaped COP mold exhibited a high responsivity to a refractive index of 906 nm/RIU at a wavelength of 625 nm.Hirotaka YamadaKenji SueyoshiHideaki HisamotoTatsuro EndoMDPI AGarticleplasmonicsnanoimprintplasmonic deviceplasmonic sensorMechanical engineering and machineryTJ1-1570ENMicromachines, Vol 12, Iss 1323, p 1323 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	plasmonics nanoimprint plasmonic device plasmonic sensor Mechanical engineering and machinery TJ1-1570
spellingShingle	plasmonics nanoimprint plasmonic device plasmonic sensor Mechanical engineering and machinery TJ1-1570 Hirotaka Yamada Kenji Sueyoshi Hideaki Hisamoto Tatsuro Endo Modulating Optical Characteristics of Nanoimprinted Plasmonic Device by Re-Shaping Process of Polymer Mold
description	Metal nanostructures exhibit specific optical characteristics owing to their localized surface plasmon resonance (LSPR) and have been studied for applications in various optical devices. The LSPR property strongly depends on the size and shape of metal nanostructures; thus, plasmonic devices must be designed and fabricated according to their uses. Nanoimprint lithography (NIL) is an effective process for repeatedly fabricating metal nanostructures with controlled sizes and shapes and require optical properties. NIL is a powerful method for mass-producible, low-cost, and large-area fabrication. However, the process lacks flexibility in adjusting the size and shape according to the desirable optical characteristics because the size and shape of metal nanostructures are determined by a single corresponding mold. Here, we conducted a re-shaping process through the air-plasma etching of a polymer’s secondary mold (two-dimensional nanopillar array made of cyclo-olefin polymer (COP)) to modulate the sizes and shapes of nanopillars; then, we controlled the spectral characteristics of the imprinted plasmonic devices. The relationship between the structural change of the mold, which was based on etching time, and the optical characteristics of the corresponding plasmonic device was evaluated through experiments and simulations. According to evaluation results, the diameter of the nanopillar was controlled from 248 to 139 nm due to the etching time and formation of a pit structure. Consequently, the spectral properties changed, and responsivity to the surrounding dielectric environment was improved. Therefore, plasmonic devices based on the re-shaped COP mold exhibited a high responsivity to a refractive index of 906 nm/RIU at a wavelength of 625 nm.
format	article
author	Hirotaka Yamada Kenji Sueyoshi Hideaki Hisamoto Tatsuro Endo
author_facet	Hirotaka Yamada Kenji Sueyoshi Hideaki Hisamoto Tatsuro Endo
author_sort	Hirotaka Yamada
title	Modulating Optical Characteristics of Nanoimprinted Plasmonic Device by Re-Shaping Process of Polymer Mold
title_short	Modulating Optical Characteristics of Nanoimprinted Plasmonic Device by Re-Shaping Process of Polymer Mold
title_full	Modulating Optical Characteristics of Nanoimprinted Plasmonic Device by Re-Shaping Process of Polymer Mold
title_fullStr	Modulating Optical Characteristics of Nanoimprinted Plasmonic Device by Re-Shaping Process of Polymer Mold
title_full_unstemmed	Modulating Optical Characteristics of Nanoimprinted Plasmonic Device by Re-Shaping Process of Polymer Mold
title_sort	modulating optical characteristics of nanoimprinted plasmonic device by re-shaping process of polymer mold
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/30253d836c6c4f908b56e3d1db6e222d
work_keys_str_mv	AT hirotakayamada modulatingopticalcharacteristicsofnanoimprintedplasmonicdevicebyreshapingprocessofpolymermold AT kenjisueyoshi modulatingopticalcharacteristicsofnanoimprintedplasmonicdevicebyreshapingprocessofpolymermold AT hideakihisamoto modulatingopticalcharacteristicsofnanoimprintedplasmonicdevicebyreshapingprocessofpolymermold AT tatsuroendo modulatingopticalcharacteristicsofnanoimprintedplasmonicdevicebyreshapingprocessofpolymermold
_version_	1718411247340224512

Modulating Optical Characteristics of Nanoimprinted Plasmonic Device by Re-Shaping Process of Polymer Mold

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