Micro triboelectric ultrasonic device for acoustic energy transfer and signal communication

Miniaturizing efficient triboelectric nanogenerators remains a challenge. Here, the authors propose a MEMS-based micro triboelectric device for acoustic energy transfer and signal communication which is capable of generating the voltage signal of 16.8 mV and 12.7 mV through oil and sound-attenuation...

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Autores principales: Chen Chen, Zhen Wen, Jihong Shi, Xiaohua Jian, Peiyang Li, John T. W. Yeow, Xuhui Sun
Formato: article
Lenguaje:EN
Publicado: Nature Portfolio 2020
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Acceso en línea:https://doaj.org/article/30aaff520b784f6a98389bbd1a6b7826
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Sumario:Miniaturizing efficient triboelectric nanogenerators remains a challenge. Here, the authors propose a MEMS-based micro triboelectric device for acoustic energy transfer and signal communication which is capable of generating the voltage signal of 16.8 mV and 12.7 mV through oil and sound-attenuation medium respectively with 63kPa at 1 MHz ultrasound input.