Electrostrictive microelectromechanical fibres and textiles
Micro-electromechanical systems fabrication techniques are based on silicon micromachining processes, resulting in rigid and low aspect ratio structures. Here the authors demonstrate a flexible, high aspect ratio micro-electromechanical system in fibre enabled by an electrostrictive ferrorelaxor ter...
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Auteurs principaux: | , , , , , , , |
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Format: | article |
Langue: | EN |
Publié: |
Nature Portfolio
2017
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Accès en ligne: | https://doaj.org/article/31b05a26ab6d49ed951bf411cfeaecd2 |
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Résumé: | Micro-electromechanical systems fabrication techniques are based on silicon micromachining processes, resulting in rigid and low aspect ratio structures. Here the authors demonstrate a flexible, high aspect ratio micro-electromechanical system in fibre enabled by an electrostrictive ferrorelaxor terpolymer layer. |
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