Electrostrictive microelectromechanical fibres and textiles

Micro-electromechanical systems fabrication techniques are based on silicon micromachining processes, resulting in rigid and low aspect ratio structures. Here the authors demonstrate a flexible, high aspect ratio micro-electromechanical system in fibre enabled by an electrostrictive ferrorelaxor ter...

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Auteurs principaux: Tural Khudiyev, Jefferson Clayton, Etgar Levy, Noémie Chocat, Alexander Gumennik, Alexander M. Stolyarov, John Joannopoulos, Yoel Fink
Format: article
Langue:EN
Publié: Nature Portfolio 2017
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Accès en ligne:https://doaj.org/article/31b05a26ab6d49ed951bf411cfeaecd2
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Résumé:Micro-electromechanical systems fabrication techniques are based on silicon micromachining processes, resulting in rigid and low aspect ratio structures. Here the authors demonstrate a flexible, high aspect ratio micro-electromechanical system in fibre enabled by an electrostrictive ferrorelaxor terpolymer layer.