Robotic fabrication of high-quality lamellae for aberration-corrected transmission electron microscopy

Abstract Aberration-corrected scanning transmission electron microscopy (STEM) is widely used for atomic-level imaging of materials but severely requires damage-free and thin samples (lamellae). So far, the preparation of the high-quality lamella from a bulk largely depends on manual processes by a...

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Autores principales:	Hideyo Tsurusawa, Nobuto Nakanishi, Kayoko Kawano, Yiqiang Chen, Mikhail Dutka, Brandon Van Leer, Teruyasu Mizoguchi
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2021
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/31e8a3cc6a6441aaa7204ba6dba5c551
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spelling	oai:doaj.org-article:31e8a3cc6a6441aaa7204ba6dba5c5512021-11-08T10:51:42ZRobotic fabrication of high-quality lamellae for aberration-corrected transmission electron microscopy10.1038/s41598-021-00595-x2045-2322https://doaj.org/article/31e8a3cc6a6441aaa7204ba6dba5c5512021-11-01T00:00:00Zhttps://doi.org/10.1038/s41598-021-00595-xhttps://doaj.org/toc/2045-2322Abstract Aberration-corrected scanning transmission electron microscopy (STEM) is widely used for atomic-level imaging of materials but severely requires damage-free and thin samples (lamellae). So far, the preparation of the high-quality lamella from a bulk largely depends on manual processes by a skilled operator. This limits the throughput and repeatability of aberration-corrected STEM experiments. Here, inspired by the recent successes of “robot scientists”, we demonstrate robotic fabrication of high-quality lamellae by focused-ion-beam (FIB) with automation software. First, we show that the robotic FIB can prepare lamellae with a high success rate, where the FIB system automatically controls rough-milling, lift-out, and final-thinning processes. Then, we systematically optimized the FIB parameters of the final-thinning process for single crystal Si. The optimized Si lamellae were evaluated by aberration-corrected STEM, showing atomic-level images with 55 pm resolution and quantitative repeatability of the spatial resolution and lamella thickness. We also demonstrate robotic fabrication of high-quality lamellae of SrTiO3 and sapphire, suggesting that the robotic FIB system may be applicable for a wide range of materials. The throughput of the robotic fabrication was typically an hour per lamella. Our robotic FIB will pave the way for the operator-free, high-throughput, and repeatable fabrication of the high-quality lamellae for aberration-corrected STEM.Hideyo TsurusawaNobuto NakanishiKayoko KawanoYiqiang ChenMikhail DutkaBrandon Van LeerTeruyasu MizoguchiNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 11, Iss 1, Pp 1-12 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Hideyo Tsurusawa Nobuto Nakanishi Kayoko Kawano Yiqiang Chen Mikhail Dutka Brandon Van Leer Teruyasu Mizoguchi Robotic fabrication of high-quality lamellae for aberration-corrected transmission electron microscopy
description	Abstract Aberration-corrected scanning transmission electron microscopy (STEM) is widely used for atomic-level imaging of materials but severely requires damage-free and thin samples (lamellae). So far, the preparation of the high-quality lamella from a bulk largely depends on manual processes by a skilled operator. This limits the throughput and repeatability of aberration-corrected STEM experiments. Here, inspired by the recent successes of “robot scientists”, we demonstrate robotic fabrication of high-quality lamellae by focused-ion-beam (FIB) with automation software. First, we show that the robotic FIB can prepare lamellae with a high success rate, where the FIB system automatically controls rough-milling, lift-out, and final-thinning processes. Then, we systematically optimized the FIB parameters of the final-thinning process for single crystal Si. The optimized Si lamellae were evaluated by aberration-corrected STEM, showing atomic-level images with 55 pm resolution and quantitative repeatability of the spatial resolution and lamella thickness. We also demonstrate robotic fabrication of high-quality lamellae of SrTiO3 and sapphire, suggesting that the robotic FIB system may be applicable for a wide range of materials. The throughput of the robotic fabrication was typically an hour per lamella. Our robotic FIB will pave the way for the operator-free, high-throughput, and repeatable fabrication of the high-quality lamellae for aberration-corrected STEM.
format	article
author	Hideyo Tsurusawa Nobuto Nakanishi Kayoko Kawano Yiqiang Chen Mikhail Dutka Brandon Van Leer Teruyasu Mizoguchi
author_facet	Hideyo Tsurusawa Nobuto Nakanishi Kayoko Kawano Yiqiang Chen Mikhail Dutka Brandon Van Leer Teruyasu Mizoguchi
author_sort	Hideyo Tsurusawa
title	Robotic fabrication of high-quality lamellae for aberration-corrected transmission electron microscopy
title_short	Robotic fabrication of high-quality lamellae for aberration-corrected transmission electron microscopy
title_full	Robotic fabrication of high-quality lamellae for aberration-corrected transmission electron microscopy
title_fullStr	Robotic fabrication of high-quality lamellae for aberration-corrected transmission electron microscopy
title_full_unstemmed	Robotic fabrication of high-quality lamellae for aberration-corrected transmission electron microscopy
title_sort	robotic fabrication of high-quality lamellae for aberration-corrected transmission electron microscopy
publisher	Nature Portfolio
publishDate	2021
url	https://doaj.org/article/31e8a3cc6a6441aaa7204ba6dba5c551
work_keys_str_mv	AT hideyotsurusawa roboticfabricationofhighqualitylamellaeforaberrationcorrectedtransmissionelectronmicroscopy AT nobutonakanishi roboticfabricationofhighqualitylamellaeforaberrationcorrectedtransmissionelectronmicroscopy AT kayokokawano roboticfabricationofhighqualitylamellaeforaberrationcorrectedtransmissionelectronmicroscopy AT yiqiangchen roboticfabricationofhighqualitylamellaeforaberrationcorrectedtransmissionelectronmicroscopy AT mikhaildutka roboticfabricationofhighqualitylamellaeforaberrationcorrectedtransmissionelectronmicroscopy AT brandonvanleer roboticfabricationofhighqualitylamellaeforaberrationcorrectedtransmissionelectronmicroscopy AT teruyasumizoguchi roboticfabricationofhighqualitylamellaeforaberrationcorrectedtransmissionelectronmicroscopy
_version_	1718442509060800512

Robotic fabrication of high-quality lamellae for aberration-corrected transmission electron microscopy

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