Robotic fabrication of high-quality lamellae for aberration-corrected transmission electron microscopy

Abstract Aberration-corrected scanning transmission electron microscopy (STEM) is widely used for atomic-level imaging of materials but severely requires damage-free and thin samples (lamellae). So far, the preparation of the high-quality lamella from a bulk largely depends on manual processes by a...

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Autores principales: Hideyo Tsurusawa, Nobuto Nakanishi, Kayoko Kawano, Yiqiang Chen, Mikhail Dutka, Brandon Van Leer, Teruyasu Mizoguchi
Formato: article
Lenguaje:EN
Publicado: Nature Portfolio 2021
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Acceso en línea:https://doaj.org/article/31e8a3cc6a6441aaa7204ba6dba5c551
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