Robotic fabrication of high-quality lamellae for aberration-corrected transmission electron microscopy
Abstract Aberration-corrected scanning transmission electron microscopy (STEM) is widely used for atomic-level imaging of materials but severely requires damage-free and thin samples (lamellae). So far, the preparation of the high-quality lamella from a bulk largely depends on manual processes by a...
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Auteurs principaux: | , , , , , , |
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Format: | article |
Langue: | EN |
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Nature Portfolio
2021
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Accès en ligne: | https://doaj.org/article/31e8a3cc6a6441aaa7204ba6dba5c551 |
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