High Aspect Ratio Structuring of Glass with Ultrafast Bessel Beams

Controlling the formation of high aspect ratio void channels inside glass is important for applications like the high-speed dicing of glass. Here, we investigate void formation using ultrafast Bessel beams in the single shot illumination regime. We characterize the morphology of the damages as a fun...

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Autores principales: Christian Vetter, Remo Giust, Luca Furfaro, Cyril Billet, Luc Froehly, Francois Courvoisier
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Lenguaje:EN
Publicado: MDPI AG 2021
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spelling oai:doaj.org-article:342cbd1926694aa1be40d1dec425e0962021-11-25T18:13:15ZHigh Aspect Ratio Structuring of Glass with Ultrafast Bessel Beams10.3390/ma142267491996-1944https://doaj.org/article/342cbd1926694aa1be40d1dec425e0962021-11-01T00:00:00Zhttps://www.mdpi.com/1996-1944/14/22/6749https://doaj.org/toc/1996-1944Controlling the formation of high aspect ratio void channels inside glass is important for applications like the high-speed dicing of glass. Here, we investigate void formation using ultrafast Bessel beams in the single shot illumination regime. We characterize the morphology of the damages as a function of pulse energy, pulse duration, and position of the beam inside fused silica, Corning Eagle XG, and Corning Gorilla glass. While a large set of parameters allow for void formation inside fused silica, the operating window is much more restricted for Eagle XG and Gorilla glass. The transient formation of a molten layer around voids enables us interpreting the evolution of the morphology with pulse energy and duration.Christian VetterRemo GiustLuca FurfaroCyril BilletLuc FroehlyFrancois CourvoisierMDPI AGarticleglassultrafast laser processingBessel beamTechnologyTElectrical engineering. Electronics. Nuclear engineeringTK1-9971Engineering (General). Civil engineering (General)TA1-2040MicroscopyQH201-278.5Descriptive and experimental mechanicsQC120-168.85ENMaterials, Vol 14, Iss 6749, p 6749 (2021)
institution DOAJ
collection DOAJ
language EN
topic glass
ultrafast laser processing
Bessel beam
Technology
T
Electrical engineering. Electronics. Nuclear engineering
TK1-9971
Engineering (General). Civil engineering (General)
TA1-2040
Microscopy
QH201-278.5
Descriptive and experimental mechanics
QC120-168.85
spellingShingle glass
ultrafast laser processing
Bessel beam
Technology
T
Electrical engineering. Electronics. Nuclear engineering
TK1-9971
Engineering (General). Civil engineering (General)
TA1-2040
Microscopy
QH201-278.5
Descriptive and experimental mechanics
QC120-168.85
Christian Vetter
Remo Giust
Luca Furfaro
Cyril Billet
Luc Froehly
Francois Courvoisier
High Aspect Ratio Structuring of Glass with Ultrafast Bessel Beams
description Controlling the formation of high aspect ratio void channels inside glass is important for applications like the high-speed dicing of glass. Here, we investigate void formation using ultrafast Bessel beams in the single shot illumination regime. We characterize the morphology of the damages as a function of pulse energy, pulse duration, and position of the beam inside fused silica, Corning Eagle XG, and Corning Gorilla glass. While a large set of parameters allow for void formation inside fused silica, the operating window is much more restricted for Eagle XG and Gorilla glass. The transient formation of a molten layer around voids enables us interpreting the evolution of the morphology with pulse energy and duration.
format article
author Christian Vetter
Remo Giust
Luca Furfaro
Cyril Billet
Luc Froehly
Francois Courvoisier
author_facet Christian Vetter
Remo Giust
Luca Furfaro
Cyril Billet
Luc Froehly
Francois Courvoisier
author_sort Christian Vetter
title High Aspect Ratio Structuring of Glass with Ultrafast Bessel Beams
title_short High Aspect Ratio Structuring of Glass with Ultrafast Bessel Beams
title_full High Aspect Ratio Structuring of Glass with Ultrafast Bessel Beams
title_fullStr High Aspect Ratio Structuring of Glass with Ultrafast Bessel Beams
title_full_unstemmed High Aspect Ratio Structuring of Glass with Ultrafast Bessel Beams
title_sort high aspect ratio structuring of glass with ultrafast bessel beams
publisher MDPI AG
publishDate 2021
url https://doaj.org/article/342cbd1926694aa1be40d1dec425e096
work_keys_str_mv AT christianvetter highaspectratiostructuringofglasswithultrafastbesselbeams
AT remogiust highaspectratiostructuringofglasswithultrafastbesselbeams
AT lucafurfaro highaspectratiostructuringofglasswithultrafastbesselbeams
AT cyrilbillet highaspectratiostructuringofglasswithultrafastbesselbeams
AT lucfroehly highaspectratiostructuringofglasswithultrafastbesselbeams
AT francoiscourvoisier highaspectratiostructuringofglasswithultrafastbesselbeams
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