High Aspect Ratio Structuring of Glass with Ultrafast Bessel Beams
Controlling the formation of high aspect ratio void channels inside glass is important for applications like the high-speed dicing of glass. Here, we investigate void formation using ultrafast Bessel beams in the single shot illumination regime. We characterize the morphology of the damages as a fun...
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MDPI AG
2021
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oai:doaj.org-article:342cbd1926694aa1be40d1dec425e0962021-11-25T18:13:15ZHigh Aspect Ratio Structuring of Glass with Ultrafast Bessel Beams10.3390/ma142267491996-1944https://doaj.org/article/342cbd1926694aa1be40d1dec425e0962021-11-01T00:00:00Zhttps://www.mdpi.com/1996-1944/14/22/6749https://doaj.org/toc/1996-1944Controlling the formation of high aspect ratio void channels inside glass is important for applications like the high-speed dicing of glass. Here, we investigate void formation using ultrafast Bessel beams in the single shot illumination regime. We characterize the morphology of the damages as a function of pulse energy, pulse duration, and position of the beam inside fused silica, Corning Eagle XG, and Corning Gorilla glass. While a large set of parameters allow for void formation inside fused silica, the operating window is much more restricted for Eagle XG and Gorilla glass. The transient formation of a molten layer around voids enables us interpreting the evolution of the morphology with pulse energy and duration.Christian VetterRemo GiustLuca FurfaroCyril BilletLuc FroehlyFrancois CourvoisierMDPI AGarticleglassultrafast laser processingBessel beamTechnologyTElectrical engineering. Electronics. Nuclear engineeringTK1-9971Engineering (General). Civil engineering (General)TA1-2040MicroscopyQH201-278.5Descriptive and experimental mechanicsQC120-168.85ENMaterials, Vol 14, Iss 6749, p 6749 (2021) |
institution |
DOAJ |
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DOAJ |
language |
EN |
topic |
glass ultrafast laser processing Bessel beam Technology T Electrical engineering. Electronics. Nuclear engineering TK1-9971 Engineering (General). Civil engineering (General) TA1-2040 Microscopy QH201-278.5 Descriptive and experimental mechanics QC120-168.85 |
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glass ultrafast laser processing Bessel beam Technology T Electrical engineering. Electronics. Nuclear engineering TK1-9971 Engineering (General). Civil engineering (General) TA1-2040 Microscopy QH201-278.5 Descriptive and experimental mechanics QC120-168.85 Christian Vetter Remo Giust Luca Furfaro Cyril Billet Luc Froehly Francois Courvoisier High Aspect Ratio Structuring of Glass with Ultrafast Bessel Beams |
description |
Controlling the formation of high aspect ratio void channels inside glass is important for applications like the high-speed dicing of glass. Here, we investigate void formation using ultrafast Bessel beams in the single shot illumination regime. We characterize the morphology of the damages as a function of pulse energy, pulse duration, and position of the beam inside fused silica, Corning Eagle XG, and Corning Gorilla glass. While a large set of parameters allow for void formation inside fused silica, the operating window is much more restricted for Eagle XG and Gorilla glass. The transient formation of a molten layer around voids enables us interpreting the evolution of the morphology with pulse energy and duration. |
format |
article |
author |
Christian Vetter Remo Giust Luca Furfaro Cyril Billet Luc Froehly Francois Courvoisier |
author_facet |
Christian Vetter Remo Giust Luca Furfaro Cyril Billet Luc Froehly Francois Courvoisier |
author_sort |
Christian Vetter |
title |
High Aspect Ratio Structuring of Glass with Ultrafast Bessel Beams |
title_short |
High Aspect Ratio Structuring of Glass with Ultrafast Bessel Beams |
title_full |
High Aspect Ratio Structuring of Glass with Ultrafast Bessel Beams |
title_fullStr |
High Aspect Ratio Structuring of Glass with Ultrafast Bessel Beams |
title_full_unstemmed |
High Aspect Ratio Structuring of Glass with Ultrafast Bessel Beams |
title_sort |
high aspect ratio structuring of glass with ultrafast bessel beams |
publisher |
MDPI AG |
publishDate |
2021 |
url |
https://doaj.org/article/342cbd1926694aa1be40d1dec425e096 |
work_keys_str_mv |
AT christianvetter highaspectratiostructuringofglasswithultrafastbesselbeams AT remogiust highaspectratiostructuringofglasswithultrafastbesselbeams AT lucafurfaro highaspectratiostructuringofglasswithultrafastbesselbeams AT cyrilbillet highaspectratiostructuringofglasswithultrafastbesselbeams AT lucfroehly highaspectratiostructuringofglasswithultrafastbesselbeams AT francoiscourvoisier highaspectratiostructuringofglasswithultrafastbesselbeams |
_version_ |
1718411429578539008 |