Experimental Investigation on Mechanical Properties of TiAlN Thin Films Deposited by RF Magnetron Sputtering

The mechanical properties of TiAlN deposited on the steel are explained in this study. Thin films are deposited by RF magnetron sputtering on the steel substrates to improve the wear resistance and hardness of the samples. Due to their improved microstructure and nanograins, the nanofilms have impro...

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Autores principales:	L. Natrayan, S. Balaji, G. Bharathiraja, S. Kaliappan, Dhinakaran Veeman, Wubishet Degife Mammo
Formato:	article
Lenguaje:	EN
Publicado:	Hindawi Limited 2021
Materias:	Technology (General) T1-995
Acceso en línea:	https://doaj.org/article/37b0397eb6424148990efcc003c15287
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spelling	oai:doaj.org-article:37b0397eb6424148990efcc003c152872021-11-15T01:20:11ZExperimental Investigation on Mechanical Properties of TiAlN Thin Films Deposited by RF Magnetron Sputtering1687-412910.1155/2021/5943486https://doaj.org/article/37b0397eb6424148990efcc003c152872021-01-01T00:00:00Zhttp://dx.doi.org/10.1155/2021/5943486https://doaj.org/toc/1687-4129The mechanical properties of TiAlN deposited on the steel are explained in this study. Thin films are deposited by RF magnetron sputtering on the steel substrates to improve the wear resistance and hardness of the samples. Due to their improved microstructure and nanograins, the nanofilms have improved the mechanical properties of the steel substrate surface. The thin film deposited has improved the wear resistance by 80% and has improved the hardness by 95%. The deposited thin films are tested for hardness by nanoindentation and wear test by the pin-on-disk test. SEM has tested films for their microstructure and adhesion by nanoscratch test.L. NatrayanS. BalajiG. BharathirajaS. KaliappanDhinakaran VeemanWubishet Degife MammoHindawi LimitedarticleTechnology (General)T1-995ENJournal of Nanomaterials, Vol 2021 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Technology (General) T1-995
spellingShingle	Technology (General) T1-995 L. Natrayan S. Balaji G. Bharathiraja S. Kaliappan Dhinakaran Veeman Wubishet Degife Mammo Experimental Investigation on Mechanical Properties of TiAlN Thin Films Deposited by RF Magnetron Sputtering
description	The mechanical properties of TiAlN deposited on the steel are explained in this study. Thin films are deposited by RF magnetron sputtering on the steel substrates to improve the wear resistance and hardness of the samples. Due to their improved microstructure and nanograins, the nanofilms have improved the mechanical properties of the steel substrate surface. The thin film deposited has improved the wear resistance by 80% and has improved the hardness by 95%. The deposited thin films are tested for hardness by nanoindentation and wear test by the pin-on-disk test. SEM has tested films for their microstructure and adhesion by nanoscratch test.
format	article
author	L. Natrayan S. Balaji G. Bharathiraja S. Kaliappan Dhinakaran Veeman Wubishet Degife Mammo
author_facet	L. Natrayan S. Balaji G. Bharathiraja S. Kaliappan Dhinakaran Veeman Wubishet Degife Mammo
author_sort	L. Natrayan
title	Experimental Investigation on Mechanical Properties of TiAlN Thin Films Deposited by RF Magnetron Sputtering
title_short	Experimental Investigation on Mechanical Properties of TiAlN Thin Films Deposited by RF Magnetron Sputtering
title_full	Experimental Investigation on Mechanical Properties of TiAlN Thin Films Deposited by RF Magnetron Sputtering
title_fullStr	Experimental Investigation on Mechanical Properties of TiAlN Thin Films Deposited by RF Magnetron Sputtering
title_full_unstemmed	Experimental Investigation on Mechanical Properties of TiAlN Thin Films Deposited by RF Magnetron Sputtering
title_sort	experimental investigation on mechanical properties of tialn thin films deposited by rf magnetron sputtering
publisher	Hindawi Limited
publishDate	2021
url	https://doaj.org/article/37b0397eb6424148990efcc003c15287
work_keys_str_mv	AT lnatrayan experimentalinvestigationonmechanicalpropertiesoftialnthinfilmsdepositedbyrfmagnetronsputtering AT sbalaji experimentalinvestigationonmechanicalpropertiesoftialnthinfilmsdepositedbyrfmagnetronsputtering AT gbharathiraja experimentalinvestigationonmechanicalpropertiesoftialnthinfilmsdepositedbyrfmagnetronsputtering AT skaliappan experimentalinvestigationonmechanicalpropertiesoftialnthinfilmsdepositedbyrfmagnetronsputtering AT dhinakaranveeman experimentalinvestigationonmechanicalpropertiesoftialnthinfilmsdepositedbyrfmagnetronsputtering AT wubishetdegifemammo experimentalinvestigationonmechanicalpropertiesoftialnthinfilmsdepositedbyrfmagnetronsputtering
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Experimental Investigation on Mechanical Properties of TiAlN Thin Films Deposited by RF Magnetron Sputtering

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